Dynamic X-ray CT Magnification for Plate Samples

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Solution Overview

Problem

Current X-ray CT methods face limitations in achieving high spatial resolution for plate-shaped samples without destructive cutting, as the rotation or resolution is restricted by the sample's width, leading to incomplete observation of internal fine structures.

Innovation Solution

The method involves rotating the sample around a rotation center between the X-ray source and detector, varying the separation distance between the X-ray source or detector and the rotation center based on the sample's shape and angle, allowing for projection image acquisition at different magnification ratios over 180° or more, enabling nondestructive, high-resolution imaging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the sample is approached to the X-ray source to increase magnification ratio, then spatial resolution is improved, but the sample and X-ray source come into contact

Engineering Contradiction:
Improvespatial resolutionVSAvoidcontact between sample and X-ray source
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies dynamics by making the separation distance between the X-ray source and rotation center variable rather than fixed. The control apparatus dynamically adjusts this distance based on the rotation angle and sample shape, allowing the system to optimize magnification ratio while preventing contact. This is achieved through equations that calculate the required separation distance as a function of rotation angle, sample width, and magnification ratio, enabling continuous adaptation during the imaging process.

Inventive Principle:
Principle #15Dynamics

2Loss of information

If the sample is rotated by 360° to collect projection images, then complete three-dimensional CT image is obtained, but plate-shaped samples come into contact with the X-ray source

Engineering Contradiction:
Improvecompleteness of three-dimensional CT imageVSAvoidcontact between sample and X-ray source
Core Design Contradiction:
Loss of informationVSObject-affected harmful factors

Solution Approach 1:

The system dynamically adjusts the separation distance during rotation to enable complete 360° imaging without contact. By continuously varying the distance between X-ray source and rotation center according to the sample's rotation angle and geometry, the apparatus maintains safe clearance while capturing projection images at all necessary angles for complete three-dimensional reconstruction.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the parameter of separation distance as a function of rotation angle. Instead of maintaining a constant distance, the system modulates this parameter dynamically throughout the rotation cycle, allowing the sample to complete full rotation while preventing contact with the X-ray source at any angle.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the separation distance is kept fixed to prevent contact, then sample safety is ensured, but magnification ratio and spatial resolution are limited

Engineering Contradiction:
Improvesample safetyVSAvoidspatial resolution
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The system transitions from fixed to dynamic separation distance control. The control apparatus calculates and adjusts the optimal separation distance in real-time based on rotation angle and sample characteristics, ensuring sample safety is maintained while maximizing magnification ratio and spatial resolution at each moment of the imaging process.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for efficient and nondestructive acquisition of three-dimensional CT images at high spatial resolution, improving the observation of fine structures within plate-shaped samples, such as electronic substrates and carbon fiber reinforced resins, by adjusting the magnification ratio and separation distances dynamically.

Implementation Method 1

X-ray CT collects a plurality of projection images (data for CT) while rotating a sample by 360°

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Data Source

PatentUS11543367B2Method acquiring projection image, control apparatus, control program, processing apparatus, and processing program
Publication Date: 2023.01.03 RIGAKU CORP
  • US11543367B2 patent drawing
  • US11543367B2 patent drawing
  • US11543367B2 patent drawing

AI summary

There is provided an acquiring method of a projection image of a sample whose shape is uneven with respect to a rotation center, the method comprising the steps of setting the sample S0 at a position of the rotation center C0 provided between an X-ray source 116a and a detector 117, and acquiring the projection image of the sample S0 at each different rotation angle for each different magnification ratio over a rotation angle of 180° or more by rotating the sample S0 around the rotation center C0, and by relatively changing a separation distance between the X-ray source and the rotation center, or a separation distance between the rotation center and the detector in an optical axis direction according to the shape of the sample S0 and the rotation angle of the sample S0.