E-Jet and Spatial ALD Integration for Area-Selective Nanofabrication

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Solution Overview

Problem

Existing area-selective atomic layer deposition (AS-ALD) methods face challenges in achieving high spatial resolution and throughput due to limitations in inkjet printing and the need for substrate transfer between printing and deposition stations, leading to alignment issues and reduced consistency.

Innovation Solution

An integrated electrohydrodynamic jet printing (E-jet printing) and spatial atomic layer deposition (SALD) system is developed, which uses E-jet printing to achieve sub-100 nm resolution by expelling jetted liquid drops with an electric field, and SALD to deposit ALD films with enhanced precision and throughput without the need for substrate transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If separate printing and deposition systems are used, then each process can be optimized independently, but the overall manufacturing time and process complexity increase

Engineering Contradiction:

Improveprinting precisionVSAvoidsystem complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines electrohydrodynamic printing and atomic layer deposition into a single integrated system where the printing chamber and deposition chamber are merged. This allows both processes to occur in the same environment without requiring separate systems, thereby reducing overall system complexity while maintaining the precision benefits of each individual process.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The integrated system enables a single device to perform multiple functions - both electrohydrodynamic printing and atomic layer deposition - within the same chamber. This multi-functionality eliminates the need for separate specialized systems, reducing complexity while preserving the optimized performance of each process.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If multiple separate processes are performed sequentially, then each process can be optimized, but the total manufacturing time increases

Engineering Contradiction:

Improvedeposition uniformityVSAvoidmanufacturing time

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

By merging the printing and deposition processes into a single integrated system with a shared chamber, the patent enables sequential or concurrent execution of both processes without the time penalties of transitioning between separate systems. The unified environment eliminates repeated chamber preparation and alignment operations.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The integrated system maintains continuous useful action by allowing the electrohydrodynamic printing and atomic layer deposition to proceed in close succession within the same chamber environment. This continuity eliminates idle time between processes and maintains process optimization while reducing total manufacturing time.

Inventive Principle:

Principle #20Continuity of useful action

3Ease of manufacture

If conventional printing methods are used, then the process is simple, but the ability to create area-selective deposition patterns is limited

Engineering Contradiction:

Improveprocess simplicityVSAvoidarea-selectivity

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces conventional mechanical printing methods with electrohydrodynamic printing, which uses electric fields to control material ejection. This substitution enables precise area-selective deposition patterns while maintaining relative process simplicity, as the electrohydrodynamic method allows digital control of material placement without complex mechanical positioning systems.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated system enables the nanofabrication of customizable 3-D thin-film devices with sub-100 nm resolution and improved precision, while reducing downtime and alignment errors, thus enhancing production throughput and consistency.

Implementation Method 1

electrohydrodynamic (EHD) jet printing

Methodology Applied

Scientific EffectElectrohydrodynamics: Electrohydrodynamics

Implementation Method 2

spatial atomic layer deposition

Methodology Applied

Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Data Source

PatentEP4004255B1Integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for area-selective atomic layer deposition

Publication Date: 2025.04.30 THE RGT UNIV OF MICHIGAN

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AI summary

An integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for conducting nanofabrication includes an electrohydrodynamic jet printing station that includes an E-jet printing nozzle, a spatial atomic layer deposition station that includes a zoned ALD precursor gas distributor that discharges linear zone-separated first and second ALD precursor gases, a heatable substrate plate supported on a motion actuator controllable to move the substrate plate in three dimensions, and a conveyor on which the motion actuator is supported. The conveyor is operative to move the motion actuator between the electrohydrodynamic jet printing station and the spatial atomic layer deposition station so that the substrate plate is conveyable between a printing window of the E-jet printing nozzle and a deposition window of the zoned ALD precursor gas distributor, respectively. A method of conducting area-selective atomic layer deposition is also disclosed.