Electron Backscatter Diffraction Analysis Using 3D Parameter Space

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Solution Overview

Problem

Current electron backscatter diffraction (EBSD) analysis methods face limitations in precision and accuracy due to the computational load and reliance on manual intervention, particularly with the 2D Hough transform's assumption of straight Kikuchi bands, which introduces systematic errors and requires extensive computational resources.

Innovation Solution

A method that involves obtaining and refining diffraction parameters by simulating Kikuchi bands using additional crystallographic information, adjusting parameters to fit the image data, and calculating a fitting parameter to assess the quality of fit, allowing for higher accuracy and reduced computational effort.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the 2D Hough transform is used to identify Kikuchi bands, then the computational process is simplified, but systematic errors are introduced due to the assumption of straight bands instead of hyperbolic curves

Engineering Contradiction:
Improvecomputational process complexityVSAvoidorientation measurement precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent transforms the diffraction parameters from the conventional 2D Hough space (rho, phi) to a new 3D parameter space that includes the Bragg angle as an additional dimension. This parameter change allows the representation of hyperbolic Kikuchi bands more accurately while maintaining computational efficiency through a structured search approach in the extended parameter space.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent extends the analysis from 2D Hough space to 3D parameter space by incorporating the Bragg angle as a third dimension. This dimensional extension enables the accurate representation of hyperbolic band curvature while providing a systematic approach to reduce computational complexity through structured parameter sampling.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the resolution of the Hough transform is increased to improve precision, then the accuracy of Kikuchi band location is improved, but the computational effort increases significantly

Engineering Contradiction:
ImproveKikuchi band location precisionVSAvoidcomputational speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent changes the parameter space from high-resolution 2D Hough coordinates to a 3D parameter space with physically meaningful variables (rho, phi, and Bragg angle). This transformation allows for a more efficient search strategy that does not require excessive sampling density, thereby maintaining precision while reducing computational burden.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent performs preliminary indexing of Kikuchi bands using the extended Hough transform to identify candidate phases and their corresponding Bragg angles. This preliminary action provides initial estimates that guide subsequent refinement steps, reducing the need for exhaustive high-resolution searches and thereby improving computational efficiency.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If manual validation is performed to ensure accuracy of phase identification, then the reliability of results is improved, but the time required for analysis increases and automation is reduced

Engineering Contradiction:
Improvephase identification reliabilityVSAvoidanalysis time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent implements an iterative refinement process where the simulated Kikuchi bands are compared with the measured pattern, and the diffraction parameters are adjusted to minimize discrepancies. This feedback loop automatically validates and refines phase identification without requiring manual intervention, maintaining high reliability while enabling full automation.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system performs self-validation through automated comparison of simulated and measured diffraction patterns. The algorithm independently assesses the quality of phase identification by evaluating the fit between simulated and observed Kikuchi bands, eliminating the need for manual validation and enabling unsupervised operation.

Inventive Principle:
Principle #25Self-service

4Measurement precision

If the extended 3D Hough transform is used to identify hyperbolic curves, then the systematic error is removed, but the computational cost increases due to the larger calculation space

Engineering Contradiction:
Improveorientation measurement accuracyVSAvoidcomputational speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent transforms the problem into a 3D parameter space with physically meaningful variables, allowing for structured sampling strategies that exploit the relationships between parameters. This reduces the effective search space compared to a brute-force approach in unstructured 3D space, thereby improving computational efficiency while maintaining accuracy.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent performs preliminary identification of candidate phases and their characteristic Bragg angles using the extended Hough transform. This preliminary action constrains the subsequent refinement search to a limited parameter range, significantly reducing the computational burden of the full 3D parameter space exploration while maintaining measurement accuracy.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the precision and robustness of phase identification and orientation measurements, reducing computational load and eliminating the need for manual validation, resulting in higher angular resolution and direct measurement of plastic deformation.

Implementation Method 1

electron backscatter diffraction (EBSD) data generated from a sample material... analysis of electron 'Kikuchi' patterns obtained using a focused electron beam in a scanning electron microscope

Methodology Applied
Scientific EffectElastic scattering:

Implementation Method 2

electron backscatter diffraction analysis... crystallographic method used to identify materials, phases, grain orientation and texture... analysis of electron 'Kikuchi' patterns

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 3

simulating second diffraction parameters of identified diffraction bands for the candidate phase... adjusting the second diffraction parameters for the identified simulated bands so as to fit the simulated bands to the bands in the image data

Methodology Applied
Scientific EffectSimulation and fitting:

Data Source

PatentUS9671354B2Method of electron beam diffraction analysis
Publication Date: 2017.06.06 OXFORD INSTR NANOTECHNOLOGY TOOLS LTD
  • US9671354B2 patent drawing
  • US9671354B2 patent drawing
  • US9671354B2 patent drawing

AI summary

A method is provided for analysing electron backscatter diffraction data generated from a sample material. An image data set representative of an image of electron backscatter diffraction bands is obtained from the sample material. A set of estimated first diffraction parameters is then generated, these defining individual electron backscatter diffraction bands in the image data set. A candidate phase is then selected together with a respective orientation for the material, based upon the generated set of estimated parameters thereby identifying diffraction bands in the image data set. Second diffraction parameters of the identified diffraction bands are simulated for the candidate phase according to the respective orientation. These second diffraction parameters are then adjusted for the identified simulated bands so as to fit the simulated bands to the bands in the image data. A fitted orientation for the candidate phase is then calculated together with a corresponding fitting parameter defining the quality of fit. The second diffraction parameters are rho and phi angles, each of which is modulated independently during the said adjusting of a fit to a single band.