Electron Beam Drawing Control for Region-to-Region Drift Correction
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Solution Overview
Problem
During electron beam drawing on a substrate, beam drift occurs due to temporary stops in drawing, leading to positional deviations of the irradiated areas from the predetermined positions, which affects the accuracy of the pattern drawn.
Innovation Solution
A drawing apparatus that includes a controller to manage the electron beam drawing process by performing beam drift corrections between the completion of drawing on one region and the start of drawing on the next, using beam drift correction to prevent inaccuracies caused by data path waits and substrate charging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the electron beam drawing process is temporarily stopped between regions, then data transfer and processing can be completed, but beam drift occurs causing positional deviation
Solution Approach 1:
The system performs preliminary actions by continuing to draw the current region even after completion to delay beam stopping, and simultaneously performs beam drift correction in advance before starting the next region. This ensures that beam positioning accuracy is maintained while allowing sufficient time for data transfer without temporary stops.
Solution Approach 2:
The drawing operation is made continuous by extending it beyond the boundary of the current region into the next region. This continuous drawing action prevents beam stopping and the associated beam drift, while the controller coordinates data transfer to occur during this extended drawing period without affecting pattern accuracy.
2Manufacturing precision
If the drawing continues without stopping to prevent beam drift, then positioning accuracy is maintained, but data transfer may be insufficient
Solution Approach 1:
The controller performs preliminary data transfer operations to accumulate sufficient data before the beam reaches region boundaries. This ensures that complete drawing data is available for subsequent regions without requiring beam stopping, thereby maintaining positioning accuracy while ensuring data completeness.
Solution Approach 2:
The system separates the timing of data transfer from the spatial progression of beam drawing. Data transfer occurs in the time dimension during beam movement, rather than requiring spatial pauses. This allows continuous drawing while ensuring adequate data transfer through coordinated timing between data input and beam traversal.
3Manufacturing precision
If beam drift correction is performed frequently, then positioning accuracy is maintained, but drawing time increases
Solution Approach 1:
Beam drift correction is performed in advance before the beam starts drawing each new region, rather than frequently during the drawing process. This preliminary correction approach maintains positioning accuracy for each region while minimizing the total time spent on corrections, thereby preserving drawing speed.
Solution Approach 2:
Instead of continuous or frequent beam drift corrections, the system applies periodic corrections at strategic points - specifically before starting each new region after data path wait. This periodic approach maintains accuracy where it matters most (at region boundaries) while minimizing interruption to the overall drawing process and maintaining productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus maintains high accuracy of electron beam positioning by periodically correcting beam drift, preventing inaccuracies due to temporary stops and ensuring precise pattern formation on the substrate.
Implementation Method 1
When an electron beam draws a pattern on a substrate
Data Source
AI summary
In one embodiment, a drawing apparatus includes a drawer configured to draw a pattern on a plurality of regions with a beam, an operator configured to transfer a data for irradiating the plurality of regions with the beam, and a controller configured to control the drawing on the plurality of regions with the drawer, based on the data for the plurality of regions transferred from the operator. When performing the drawing on a first region and then the drawing on a second region, the controller corrects a state of the drawer between completion of drawing on the first region and completion of transfer of the data for the second region or the controller delays the completion of drawing on the first region to shorten time from the completion of drawing on the first region to the completion of transfer of the data for the second region.