EBSD Detector Afterglow Correction for High-Speed SEM Imaging
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Solution Overview
Problem
EBSD detector afterglow effects cause horizontal streaking and poor spatial resolution in high-speed scanning electron microscope imaging, compromising image quality and analysis flexibility.
Innovation Solution
A method to correct electron imaging data using an afterglow model to mitigate detector screen afterglow effects, employing a persistence correction algorithm to calculate pixel values and reduce luminescence persistence contributions in EBSD detector images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-speed scanning is used to improve productivity, then acquisition speed increases, but afterglow effects cause horizontal streaking and poor spatial resolution
Solution Approach 1:
The patent applies an afterglow model to characterize the luminescence persistence of the scintillator member and uses this model to correct the acquired image data. By modeling the harmful afterglow effect and mathematically removing its contribution, the patent converts the previously harmful persistence into a correctable parameter, enabling high-speed acquisition without sacrificing spatial resolution
Solution Approach 2:
The patent implements a feedback mechanism where the acquired image data is processed through an afterglow correction algorithm that uses the characterized luminescence persistence parameters to iteratively remove afterglow contributions. This feedback loop continuously refines the image data by comparing acquired signals against the modeled afterglow response, enabling real-time correction of streaking artifacts
2Duration of action of stationary object
If faster scintillator materials are used to reduce afterglow, then luminescence persistence decreases, but electron detection sensitivity is compromised
Solution Approach 1:
Instead of changing the physical material parameters of the scintillator, the patent changes the processing parameters by applying computational correction algorithms. The afterglow model characterizes the persistence behavior and applies mathematical transformations to the acquired data, effectively reducing the impact of luminescence persistence without altering the scintillator material or sacrificing detection sensitivity
Solution Approach 2:
The patent replaces the physical approach of using faster scintillator materials with a computational approach. Instead of relying on material science advances to reduce persistence, the system uses software-based afterglow correction algorithms that model and remove persistence effects from the acquired data, substituting mechanical/material solutions with information-processing solutions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Produces high-quality, afterglow-corrected images with improved spatial resolution and flexibility, maintaining electron detection sensitivity without requiring faster scintillator materials.
Implementation Method 1
a scintillator member, typically in the form of a phosphor screen, which converts incident electrons to a light pulse for imaging
Implementation Method 2
All phosphor screens have a luminescence persistence characteristic; that is, the screen glows for a period after being struck by an electron
Data Source
AI summary
A method of obtaining an image of a specimen in a scanning electron microscope, the image being modified by way of compensating for detector afterglow effects, is provided. The method includes: acquiring first image data, the first image data including a plurality of pixels having values representing monitored electrons emitted from the specimen, at a plurality of locations within a region thereof as a result of an electron beam of the scanning electron microscope impinging upon the plurality of locations, and incident upon a scintillator member of an electron backscatter diffraction, EBSD, detector, and generating a modified image including a plurality of pixels each having a value calculated based on the value of a corresponding pixel of the first image data and an afterglow model representative of a luminescence persistence characteristic of the scintillator member. A system and computer program product are also provided.