EBSD Detector Positioning in Charged Particle Beam Devices
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Solution Overview
Problem
In charged particle beam devices, efficiently analyzing a sample with an EBSD detector is challenging due to the need for tilting the sample stage to 70 degrees, which can lead to interference with the detector, restricted stage movement, and difficulty in maintaining the sample within the field of view, resulting in lengthy adjustments for both beginners and experienced operators.
Innovation Solution
A charged particle beam device with a control unit that manages the sample stage's planar, tilt, and rotational movements, along with an image display unit to distinguish observable and non-observable areas, allows for pre-ascertainment of analyzable positions and quick adjustment to desired analysis positions using an operation input unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the sample stage is tilted to 70 degrees for efficient EBSD detection, then the detection efficiency of backscattered electrons is improved, but the sample stage may contact the EBSD detector and members in the charged particle beam optical system
Solution Approach 1:
The patent introduces a vertical movement dimension for the sample stage, allowing it to move not only in tilt and rotation but also in the vertical direction. This additional degree of freedom enables the stage to clear the EBSD detector and optical system members when tilted to 70 degrees, preventing contact interference while maintaining efficient EBSD detection
Solution Approach 2:
The patent implements dynamic control of the sample stage with multiple movement capabilities (tilt, rotation, and vertical movement) that can be adjusted in real-time. The control unit coordinates these movements to optimize the stage position, allowing efficient EBSD detection at 70 degrees tilt while dynamically avoiding contact with the detector and optical members
2Productivity
If the sample is set on the sample table and then tilted to 70 degrees, then EBSD analysis can be performed, but the sample may escape from the field of view due to movement of the sample stage
Solution Approach 1:
The patent employs feedback control by displaying the relationship between the charged particle beam irradiation position and the EBSD detector observation position on a display unit. This visual feedback allows the operator to monitor sample position in real-time and make precise adjustments to keep the sample within the field of view during stage movement and tilting operations
Solution Approach 2:
The patent enables preliminary setting of the sample position and stage configuration before EBSD analysis begins. The control unit allows pre-adjustment of the sample stage tilt angle and position, and the display unit shows the expected field of view, allowing the operator to ensure the sample will remain in view before starting the analysis
3Productivity
If a sample table specialized for EBSD is used which disposes the sample in a pre-tilted state, then EBSD detection is optimized, but stage movement in the rotation direction of the sample is restricted
Solution Approach 1:
The patent designs a universal sample stage that can perform multiple functions: it can be tilted to 70 degrees for optimized EBSD detection, rotated to access different sample areas, and moved vertically to avoid detector contact. This multi-functional stage replaces the need for specialized pre-tilted sample tables, providing both EBSD optimization and versatile movement capability
Solution Approach 2:
The patent implements a dynamically adjustable sample stage with multiple degrees of freedom (tilt, rotation, vertical movement) that can be controlled independently. This dynamic configuration allows the stage to achieve the 70-degree tilt for EBSD optimization while maintaining full rotational movement capability to access any area of the sample, eliminating the restrictions of fixed pre-tilted tables
4Measurement precision
If manual adjustment of the sample position is performed to ensure the analysis portion can be analyzed, then accurate positioning is achieved, but an enormous amount of time is required for adjustment
Solution Approach 1:
The patent provides real-time visual feedback on the display unit showing the relationship between the charged particle beam irradiation position and the EBSD detector observation position. This feedback mechanism guides the operator to make accurate positioning adjustments quickly, reducing the time required to achieve precise sample positioning while ensuring the analysis portion is correctly positioned
Solution Approach 2:
The patent replaces manual trial-and-error mechanical adjustment with a controlled system that uses display feedback to guide positioning. The control unit coordinates stage movements based on the displayed information, reducing the time and effort required for accurate positioning compared to purely manual adjustment methods
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and timely adjustment of the sample to analyzable positions, reducing the time required for analysis and preventing sample escape from the field of view, thereby improving operational efficiency and user convenience.
Implementation Method 1
When a charged particle beam is converged and irradiated on the surface of a sample, a diffraction image of backscattered electrons generated from the sample surface based on the crystal orientation thereof is projected onto the fluorescent screen
Implementation Method 2
An EBSD detector has a structure in which a fluorescent screen is disposed on the distal end of a high sensitivity camera
Data Source
AI summary
A charged particle beam device allowing an analysis position in a sample analyzable with an EBSD detector to be acquired beforehand, and allowing a sample to be adjusted to a desired analysis position in a short time. A charged particle beam device is provided with a charged particle source (111), a charged particle optical system (115), an EBSD detector (101), a sample stage (116), an image display unit (117) for displaying a portion of the sample observable with the EBSD detector and a non-observable portion of the sample such that said portions are distinguished from each other, an operation input unit (121) where a position to be observed by the EBSD detector is entered, and a control unit (118) for controlling a planar movement, an inclination movement and a rotation movement of the sample stage so as to allow the observation position entered from the operation input unit to be observed with the EBSD detector.