EBSD Kikuchi Band Vector Matching for Sample Characterization

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Solution Overview

Problem

Current automatic indexing techniques in electron backscatter diffraction (EBSD) face challenges in accurately analyzing EBSD images due to measurement errors and the need for external knowledge of sample chemistry, leading to incorrect or inaccurate results.

Innovation Solution

A method that identifies Kikuchi bands in EBSD images by forming vector representations based on estimated positions and matches them with expected vector representations, using cylindrical symmetry and rotation to improve accuracy in determining sample configurations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If automatic indexing techniques are used to analyze EBSD images, then productivity is improved, but measurement precision deteriorates due to measurement errors and incorrect indexing

Engineering Contradiction:
Improveautomation of indexing processVSAvoidaccuracy of Kikuchi band indexing
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The indexing process is divided into multiple stages: initial identification of Kikuchi bands, selection of a subset of bands for detailed analysis, and iterative refinement of indexing solutions. This segmentation allows the automated process to handle complexity while maintaining precision by focusing computational resources on critical subsets of data.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Instead of attempting to index all Kikuchi bands simultaneously, the method selectively indexes a subset of bands that provide sufficient information for accurate characterization. This partial action approach reduces the impact of measurement errors in individual bands while maintaining overall indexing accuracy.

Inventive Principle:
Principle #16Partial or excessive action

2Loss of information

If all Kikuchi bands are indexed simultaneously, then completeness of analysis is improved, but device complexity increases due to the square increase in interplanar angle combinations

Engineering Contradiction:
Improvecompleteness of Kikuchi band analysisVSAvoidcomputational complexity of indexing algorithm
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The set of all Kikuchi bands is divided into subsets for sequential processing. The algorithm identifies and indexes bands in groups rather than attempting to process all bands simultaneously, reducing the computational burden from O(n²) to a more manageable complexity while still achieving comprehensive coverage.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The method performs preliminary identification and filtering of Kikuchi bands before detailed indexing. By pre-processing the data to select the most informative bands and establish initial geometric constraints, the algorithm reduces the complexity of subsequent indexing operations while ensuring complete analysis.

Inventive Principle:
Principle #10Preliminary action

3Device complexity

If limited automatic indexing is used to fit only 3 intersection angles at a time, then device complexity is reduced, but measurement precision deteriorates due to measurement errors causing missed correct indexing solutions

Engineering Contradiction:
Improvesimplicity of indexing algorithmVSAvoidaccuracy of indexing solution
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The indexing algorithm incorporates feedback mechanisms where initial indexing results are evaluated and used to refine subsequent indexing attempts. Measurement errors are detected and corrected through iterative processes that compare expected geometric relationships with observed data, improving precision without requiring overly complex algorithms.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

Geometric constraints and expected angular relationships are pre-calculated and stored as reference data. This preliminary preparation allows the algorithm to quickly compare observed Kikuchi band intersections with theoretical values, improving precision through efficient pattern matching rather than complex real-time calculations.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the accuracy and confidence of sample characterization by efficiently matching more Kikuchi bands, thereby improving the determination of crystalline phases, unit cell dimensions, and lattice orientations.

Implementation Method 1

The electrons are diffracted from crystal planes within the sample, to produce a series of overlapping 'bright' bands which form an electron backscatter diffraction pattern

Methodology Applied
Scientific EffectElectron diffraction: Diffraction

Implementation Method 2

The electrons collide with the phosphor screen which fluoresces and the resulting light may be detected using a lens assembly and a camera

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Data Source

PatentUS20250012742A1Methods and apparatus for electron backscatter diffraction sample characterisation
Publication Date: 2025.01.09 FEI CO
  • US20250012742A1 patent drawing
  • US20250012742A1 patent drawing
  • US20250012742A1 patent drawing

AI summary

A method of analyzing a sample imaged by electron backscatter diffraction. The method comprises identifying a plurality of Kikuchi bands in an electron backscatter diffraction image of a position on the sample. The method further comprises forming, for each identified Kikuchi band, a respective vector representation of said Kikuchi band based at least in part on an estimate of the position on the sample. A configuration of the sample is determined by identifying a particular set of expected vector representations from a plurality of sets of expected vector representations as matching the vector representations of the plurality of identified Kikuchi bands.