Spatial Aggregation of EBSD Spectra for Signal-to-Noise Improvement

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Solution Overview

Problem

Conventional Electron Backscatter Diffraction (EBSD) and Energy Dispersive Spectrometry (EDS) techniques face challenges in achieving high-quality diffraction patterns and spectral analysis due to factors like poor surface preparation, fine grain size, deformation, and hydrocarbon contamination, leading to reduced signal-to-noise ratios and increased collection times.

Innovation Solution

A method for spatially averaging diffraction patterns by acquiring a central spectrum and adjacent spectra, either during live acquisition or from saved spectral maps, and aggregating them to produce an averaged spectrum, which reduces noise and enhances signal quality by averaging pixel brightness and electron band positions, while ensuring accurate crystal orientation calculation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional EBSD and EDS techniques are used, then analysis can be performed on samples, but the signal-to-noise ratio is reduced and collection time is increased due to poor surface preparation, fine grain size, deformation, and hydrocarbon contamination

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidcollection time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent combines multiple diffraction patterns and spectral data from adjacent sampling locations into a single aggregated measurement. By merging data from multiple positions, the signal-to-noise ratio is improved through statistical aggregation while the total collection time remains manageable since the aggregation is performed computationally rather than requiring extended physical measurement time.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from point-by-point analysis to spatial aggregation across multiple dimensions. Instead of analyzing a single sampling location, the system aggregates data from multiple adjacent locations in the spatial domain, effectively adding a spatial dimension to the analysis and improving measurement precision through combined statistical power.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If multiple spectra are aggregated spatially, then the signal-to-noise ratio is improved and measurement precision is enhanced, but the complexity of data processing increases

Engineering Contradiction:
Improvediffraction pattern qualityVSAvoiddata processing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the sample surface into multiple sampling locations and collects diffraction patterns and spectra at each location. This segmentation allows systematic data collection that can be processed through automated aggregation algorithms, managing complexity through structured data acquisition rather than monolithic processing.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system performs self-service through automated algorithms that automatically identify sampling locations, aggregate spectra, and calculate crystallographic orientations without requiring manual intervention. This automation reduces the operational complexity burden on the user while maintaining high measurement precision.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the signal-to-noise ratio and reduces ambiguity in diffraction pattern analysis, enabling faster and more confident orientation measurements, even in samples with poor surface quality or fine grain sizes, thereby increasing the efficiency of material characterization.

Implementation Method 1

Electron Backscatter Diffraction ('EBSD')... images crystallographic orientations from a prepared surface

Methodology Applied
Scientific EffectElectron diffraction: Diffraction

Implementation Method 2

The electron source may emit electrons that are directed in a beam through the column and toward a sample chamber

Methodology Applied
Scientific EffectElastic scattering: Scattering

Implementation Method 3

Energy dispersive spectrometry ('EDS')... images surfaces in which an interaction volume of the electron beam interacts with the desired sample region

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Data Source

PatentUS10139356B2Devices and systems for spatial aggregation of spectral analysis from electron microscopes
Publication Date: 2018.11.27 GATAN INC
  • US10139356B2 patent drawing
  • US10139356B2 patent drawing
  • US10139356B2 patent drawing

AI summary

An x-ray spectrum collected from a sample via excitation of the sample by an electron beam includes artifacts due to interaction volume, surface effects, contamination, or other interferences with the desired collection of representative x-rays from the sample. Inline spectral correlation, summation, averaging, other aggregation, or combinations thereof provides more precise collection of x-ray spectrum from multi-phase, unprepared, particle, or complex samples.