EBSD Sample Orientation Tool for Stable Pre-Tilt Alignment
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Solution Overview
Problem
Current EBSD setups face inefficiencies due to sample settling times, risk of SEM component damage, and instability during orientation, which affect data quality and component longevity.
Innovation Solution
An orientation tool and method that pre-tilts the sample at a 20-degree angle relative to the vertical axis, using a mount and locating collar system within the SEM, ensuring consistent working distance and detector alignment, reducing settling time and minimizing component damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the sample is tilted to 70 degrees from horizontal using a tilting mechanism, then the sample orientation is appropriate for EBSD evaluation, but the risk of damage to SEM components increases and a long settling time is required
Solution Approach 1:
The sample is pre-oriented to 70 degrees from horizontal using a pre-tilt mechanism before being inserted into the SEM chamber. This preliminary action eliminates the need for tilting the sample inside the chamber, thereby preventing damage to SEM components while maintaining the required orientation precision for EBSD evaluation
Solution Approach 2:
The orientation function is separated from the SEM chamber operations. The sample mounting and pre-tilting are performed externally on a separate fixture, then the pre-oriented sample is transferred as a complete unit into the SEM. This segmentation isolates the tilting operation from sensitive SEM components
2Manufacturing precision
If the sample is tilted to 70 degrees from horizontal, then the sample orientation is appropriate for EBSD evaluation, but the settling time increases to 45 minutes to two hours
Solution Approach 1:
The sample is pre-oriented to the correct angle and allowed to settle in its final position before being inserted into the SEM chamber. This preliminary settling action eliminates the need for extended settling time inside the chamber, reducing the overall process time from 45 minutes to two hours to just the insertion and evaluation time
3Adaptability or versatility
If the sample is tilted inside the SEM chamber, then the sample orientation can be adjusted, but the complexity of the procedure increases and the risk of component damage increases
Solution Approach 1:
The sample is pre-oriented to 70 degrees from horizontal using a pre-tilt mechanism before being inserted into the SEM chamber. This preliminary action eliminates the need for tilting the sample inside the chamber, thereby preventing damage to SEM components while maintaining the required orientation precision for EBSD evaluation
Solution Approach 2:
The tilting and orientation functions are extracted from the SEM chamber environment and performed externally on a separate mounting fixture. This extraction simplifies the procedure by eliminating complex internal tilting mechanisms and reduces the risk of damaging sensitive SEM components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances data quality and stability by eliminating settling time, reducing SEM component damage, and maintaining precise sample orientation for efficient EBSD analysis.
Implementation Method 1
Electrons from the crystalline material are backscattered and strike a phosphor screen of an EBSD detector and produce light
Implementation Method 2
Because some of the scattered electrons impinge upon planes of atoms in the crystalline material in such a way that conditions for Bragg diffraction are satisfied, pairs of curved lines for each lattice plane can be formed
Implementation Method 3
Electrons from the crystalline material are backscattered and strike a phosphor screen of an EBSD detector and produce light that is detected by a camera
Data Source
AI summary
An orientation tool for orienting a sample mount having a sample for evaluation by a scanning electron microscope using an electron backscatter diffraction detector includes a body having a bottom surface and a top surface, an angled flat face extending from the bottom surface to the top surface, and a mount portion formed in the body between the top surface and the angled flat face. The mount portion is defined by a wall and a support surface. The wall extends from the top surface to the support surface and the support surface extends from the wall to the angled flat face. The wall is angled at 20 degrees with respect to an imaginary vertical line perpendicular to the bottom surface. The mount portion is sized to receive the sample mount and orient the sample relative to the electron backscatter diffraction detector.