3D Crystal Orientation Map Construction from EBSP Data
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Solution Overview
Problem
Existing crystal analysis apparatuses are unable to accurately display crystal orientations on the side surfaces of a 3D crystal orientation map, as they only construct maps based on cross-sections formed by focused ion beams, leaving side surfaces and internal faces with incorrect or missing orientation data.
Innovation Solution
A crystal analysis apparatus that includes a measurement data storage for EBSP data, a crystal orientation database, and a map constructing unit capable of reading out and displaying crystal orientations in the normal directions of all faces of a polyhedral image, including side surfaces and internal faces, to construct a 3D crystal orientation map with correct orientations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If crystal orientations are displayed only in the normal direction of cross-sections, then measurement precision on cross-sections is maintained, but crystal orientations on internal faces and side surfaces cannot be displayed
Solution Approach 1:
The invention creates a universal mapping system that handles multiple types of surfaces (cross-sections, side surfaces, internal faces) through a unified polyhedral framework. Each face of the polyhedron can be assigned a normal direction, and crystal orientation data can be retrieved and displayed for any face type using the same mechanism. This multi-functional approach allows the system to adapt to different display requirements without compromising measurement precision on any surface type.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the accurate display of crystal orientations on all faces of a 3D crystal orientation map, including side surfaces and internal faces, allowing for precise analysis of crystal structures with multiple grain orientations within a single face.
Implementation Method 1
measurement of an electron back-scattering pattern (EBSP) by irradiating the sample with electron beams (EB) and detecting electrons backscattered by the sample
Data Source
AI summary
A crystal analysis apparatus includes: a measurement data storage configured to store electron back-scattering pattern (EBSP) data measured at electron beam irradiation points on a plurality of cross-sections of a sample formed substantially in parallel at prescribed intervals; a crystal orientation database configured to accumulate therein information of crystal orientations corresponding to EBSPs; and a map constructing unit that constructs a three-dimensional crystal orientation map based on distribution of crystal orientations in normal directions of a plurality of faces of a polyhedral image having the cross-sections arranged at the prescribed intervals by reading out the crystal orientations in the normal directions of the faces from the crystal orientation database on the basis of the EBSP data stored in the measurement data storage.