Eccentric Cover Mechanism for Compact Particle Beam Vacuum Chamber
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Solution Overview
Problem
Existing particle beam processing devices face challenges in reducing the vacuum chamber volume while maintaining variable workpiece processing and preventing damage to supply lines during the movement of the particle beam generator.
Innovation Solution
The use of an eccentrically rotatable cover arrangement with a pressure compensation mechanism allows for precise control of the particle beam generator's movement within the vacuum chamber, reducing the chamber volume and preventing excessive rotation of supply lines.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of stationary object
If the particle beam generator is moved within the vacuum chamber using eccentric disk mechanisms, then the vacuum chamber volume can be reduced, but the supply lines may be damaged due to excessive rotation
Solution Approach 1:
The patent implements a dynamic solution by making the particle beam generator movable within the vacuum chamber using eccentric disk mechanisms. This allows the generator to be repositioned to different locations and orientations, enabling flexible processing of workpieces while maintaining a compact chamber volume. The movable design replaces fixed installations that would require larger chambers.
Solution Approach 2:
The patent employs a composite support structure consisting of multiple eccentric disks (first eccentric disk, second eccentric disk) working together with the particle beam generator. This composite mechanical system enables complex two-dimensional movement and rotation capabilities while maintaining structural integrity and protecting supply lines from damage.
2Productivity
If the particle beam generator is made movable to reduce chamber volume, then horizontal travel distances are reduced by 40-50%, but the complexity of the positioning mechanism increases
Solution Approach 1:
The positioning mechanism is segmented into multiple independent components: a first eccentric disk for one dimension of movement, a second eccentric disk for another dimension, and the particle beam generator itself. This segmentation allows each component to perform a specific function, simplifying the overall design while achieving complex two-dimensional positioning capabilities that reduce horizontal travel distances by 40-50%.
3Volume of stationary object
If the particle beam generator is moved vertically within the chamber, then vertical chamber volume is reduced by 40-50%, but pressure control becomes more difficult
Solution Approach 1:
The patent introduces a pressure compensation mechanism as an intermediary system that actively manages pressure changes during vertical movement of the particle beam generator. This mechanism compensates for pressure variations caused by the generator's movement, maintaining stable vacuum conditions and enabling vertical positioning that reduces chamber volume by 40-50% without compromising pressure control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces the vacuum chamber volume by enabling the particle beam generator to be moved instead of the workpiece, resulting in a 40-50% reduction in horizontal travel distances and a 40-50% reduction in vertical chamber volume, while ensuring secure operation and preventing damage to supply lines.
Implementation Method 1
The provision of a pressure compensation means enables the precise control of the movement of a particle beam generator
Data Source
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AI summary
The invention relates to a particle beam processing device having a particle beam generator (7), a vacuum chamber (101) comprising a chamber volume (V) that can be evacuated, wherein the vacuum chamber (101) has a chamber wall (1) with a first opening (O1) which is designed in the chamber wall (1). Said device also has a first cover (2) which is adapted to cover the first opening (O1) and to be rotated about a first rotational axis (C1) passing through the first opening (O1), and a second opening (O2) which is designed in the first cover (2). Said device also has a second cover (3) which is adapted to cover the second opening (O2) and to be rotated about a second rotational axis (C2) passing through the second opening (O2) and move the particle beam generator (7). The particle beam generator (7) can be driven in a first direction (Z) in the chamber volume (V) that can be evacuated.