Eccentric Nozzle Cleaning Vortex Flow for Uniform Substrate Processing
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Solution Overview
Problem
Conventional nozzle cleaning devices fail to uniformly clean nozzles, particularly missing the upper parts due to overflow issues and inadequate distribution of cleaning liquids, which can lead to substrate damage from adherent cohesive materials.
Innovation Solution
A nozzle cleaning device with a cylindrical storage tank that discharges cleaning liquid eccentric to its central axis, forming a vortex flow and allowing overflow, ensuring uniform cleaning from the front end to the upper part of the nozzle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If cleaning liquid is injected from one side of the nozzle, then the injection side can be cleaned, but the other side of the nozzle cannot be cleaned sufficiently
Solution Approach 1:
The cleaning liquid discharge structure is segmented into multiple discharge ports positioned at different locations (including both sides of the nozzle and upper part) to provide comprehensive cleaning coverage that a single discharge location cannot achieve
Solution Approach 2:
Multiple discharge functions are merged into a single integrated cleaning device, combining side discharge and upper part discharge capabilities in one system to achieve uniform cleaning throughout the nozzle
2Manufacturing precision
If cleaning liquid is supplied to clean the upper part of the nozzle, then the upper part can be cleaned, but the cleaning liquid may overflow the storage tank
Solution Approach 1:
The storage tank is pre-designed with an overflow discharge port positioned at an appropriate height to prevent overflow before it becomes a problem, allowing excess cleaning liquid to be discharged controllably during the cleaning process
Solution Approach 2:
The overflow discharge port acts as an intermediary mechanism that manages excess cleaning liquid, providing a controlled discharge path that prevents uncontrolled overflow while maintaining adequate liquid levels for effective cleaning
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively cleans nozzles from the front end to the upper part, preventing substrate damage by ensuring thorough removal of cohesive materials, improving cleaning efficiency and uniformity.
Implementation Method 1
form a vortex flow of the cleaning liquid revolving within the storage tank
Data Source
AI summary
A nozzle cleaning device is capable of uniformly cleaning a nozzle from a front end of the nozzle to an upper part thereof. The nozzle cleaning device includes a storage tank, a liquid discharging portion and an overflow discharging portion. The storage tank has a cylindrical inner peripheral surface and is configured to store therein a cleaning liquid that cleans a nozzle used in a substrate process. The liquid discharging portion is configured to discharge the cleaning liquid into the storage tank toward a position eccentric with respect to a central axis of the cylindrical inner peripheral surface to store the cleaning liquid within the storage tank and configured to form a vortex flow of the cleaning liquid revolving within the storage tank. The overflow discharging portion is configured to discharge the cleaning liquid that overflows the storage tank.