Eccentric Optical Passageway in Reflecting Element
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Solution Overview
Problem
Optical elements with reflective areas deviating from rotational symmetry pose challenges in providing support without introducing excessive stresses and deformations, which can deteriorate imaging accuracy, while rotationally symmetric designs require more space and are less compact.
Innovation Solution
Designing an optical element with a rotationally symmetric body and an eccentric optical passageway allows light to pass through while maintaining simple stress and deformation minimized support, enabling a compact and accurate optical system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If optical elements with non-rotationally symmetric reflective areas are used to achieve compact design, then device size is reduced, but support complexity increases and imaging accuracy deteriorates due to excessive stresses and deformations
Solution Approach 1:
The patent applies asymmetry by positioning the optical passageway eccentrically relative to the rotationally symmetric optical element body. This creates an asymmetric internal structure within a symmetric external form, allowing the light path to be optimized for compact design while the symmetric body maintains uniform stress distribution for high imaging accuracy.
2Volume of moving object
If optical elements with non-rotationally symmetric reflective areas are used to achieve compact design, then device size is reduced, but support structure complexity increases
Solution Approach 1:
The patent applies local quality by creating a localized asymmetric feature (the eccentric optical passageway) within an otherwise uniformly symmetric optical element body. This allows the specific local region to fulfill the compact design requirement while the overall symmetric structure maintains simplicity in support requirements.
3Manufacturing precision
If rotationally symmetric optical element designs are used, then support structure is simplified and imaging accuracy is maintained, but device size increases and compact design is lost
Solution Approach 1:
The patent segments the optical element into two functional parts: a rotationally symmetric body that provides structural stability and uniform stress distribution, and an eccentrically positioned optical passageway that enables compact light path design. This segmentation allows each part to optimize its specific function without compromising the other.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the effort needed for supporting optical elements with non-rotationally symmetric reflective areas, maintaining high imaging accuracy and achieving a compact design by allowing light to pass through an optical element with a rotationally symmetric body, thus minimizing distortions and supporting the element effectively.
Implementation Method 1
an optical passageway (107.6) arranged within the first optical element body (107.1) and allowing light to pass the first optical element body (107.1)
Data Source
AI summary
There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.