Edge-Constrained Optical Membrane Deformable Mirror

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Deformable mirrors face issues with ripple effects and surface accuracy due to lap normal and shear forces during polishing, which constrain actuator design and membrane flexibility, leading to suboptimal surface finishes and limited inter-actuator stroke.

Innovation Solution

An edge-constrained optical membrane deformable mirror design featuring actuators supported by a stiffer support structure, with an optical membrane elastically decoupled to accommodate polishing forces, allowing for higher aspect ratios and thinner, more flexible membranes, and improved sealing during lapping.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the membrane is edge constrained more rigidly to reduce rippling during polishing, then the ripple effect is reduced, but when the clamping force is released the mirror surface loses surface accuracy and more polishing is necessary

Engineering Contradiction:
Improvesurface finish accuracyVSAvoidsurface accuracy retention
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

A compliant shim is introduced as an intermediary element between the membrane and the rigid clamp. The shim has sufficient stiffness to resist polishing loads and reduce rippling, yet is compliant enough to allow the membrane to maintain its polished shape after clamping is released, eliminating the need for repeated polishing

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The stiffness parameter of the support structure is optimized to provide adequate rigidity during polishing to prevent rippling, while the compliant shim provides controlled compliance to maintain surface accuracy after polishing. This parameter optimization resolves the contradiction between reducing ripple and maintaining surface accuracy

Inventive Principle:
Principle #35Parameter changes

2Length of moving object

If longer, thinner actuators are used to produce more compact deformable mirrors with long stroke, then the mirror becomes more compact with higher authority, but the actuators lack sufficient stiffness to withstand polishing forces without distortion

Engineering Contradiction:
Improveactuator strokeVSAvoidactuator stiffness
Core Design Contradiction:
Length of moving objectVSStrength

Solution Approach 1:

The support structure is segmented into a rigid portion that provides overall structural support and stiffness during polishing, and a compliant portion that allows actuator movement. This segmentation enables long-stroke actuators to maintain sufficient stiffness during polishing while achieving their full stroke range during operation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the support structure have different stiffness properties: the region supporting the actuators during polishing is made rigid to withstand polishing forces, while the region allowing actuator movement is made compliant to enable long stroke. This local quality differentiation resolves the contradiction between actuator length and stiffness

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If the shim is made more stiff to reduce rippling, then the ripple effect is reduced, but the membrane becomes vulnerable to damage and the clamping force causes relaxation loss of surface accuracy

Engineering Contradiction:
Improvesurface finish qualityVSAvoidmembrane damage and relaxation
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The shim stiffness parameter is optimized to provide adequate rigidity to resist polishing loads and reduce rippling, while remaining compliant enough to allow the membrane to maintain its polished shape after clamping is released. This optimal parameter selection prevents both rippling and relaxation damage

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The compliant shim acts as a mediator between the rigid clamp and the delicate membrane, providing sufficient support to prevent rippling while being gentle enough to prevent membrane damage and maintain surface accuracy after polishing

Inventive Principle:
Principle #24Intermediary (Mediator)

4Adaptability or versatility

If thinner membranes are used to increase flexibility and eliminate inter-actuator stroke limits, then the membrane becomes more flexible, but the membrane lacks sufficient stiffness to withstand polishing forces

Engineering Contradiction:
Improvemembrane flexibilityVSAvoidmembrane stiffness
Core Design Contradiction:
Adaptability or versatilityVSStrength

Solution Approach 1:

The support structure provides localized rigid support to thin membranes during polishing, while allowing flexibility during actuator operation. This local quality differentiation enables thin, flexible membranes to withstand polishing forces without requiring increased overall membrane thickness

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The support structure acts as an intermediary that provides temporary rigid support to thin membranes during the polishing process, enabling them to withstand polishing forces, while allowing them to remain flexible during operational actuation

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces ripple distortion, enables higher accuracy finishes, and increases inter-actuator stroke, maintaining surface accuracy without relaxation after polishing, with improved sealing and reduced liquid absorption.

Implementation Method 1

an intermediate area elastically decoupling the first and second areas of the optical membrane

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

bonded to the actuators using a bonding medium such as epoxy

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS7547107B2Edge constrained optical membrane deformable mirror and method of fabricating
Publication Date: 2009.06.16 NORTHROP GRUMMAN SYSTEMS CORP
  • US7547107B2 patent drawing
  • US7547107B2 patent drawing
  • US7547107B2 patent drawing

AI summary

Fabricating a deformable mirror by providing a plurality of actuators and a support structure supporting and at least partially surrounding the actuators; applying an optical membrane across the actuators and at least a portion of the support structure; the optical membrane including a first area, a second area and an intermediate area elastically decoupling the first and second areas; bonding the first area to the actuators and the second area to the support structure; and polishing the optical membrane.