Edge Exposure Light Output Control for Stable Illuminance
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Solution Overview
Problem
Conventional edge exposure apparatus lamps operate at maximum power, leading to reduced lamp life due to decreasing luminance intensity, which affects the stability and efficiency of the exposure process.
Innovation Solution
A method and apparatus for controlling the light source output in an edge exposure apparatus by measuring illuminance values, setting a reference illuminance value, and adjusting the output based on real-time measurements to maintain electrical stability and target illuminance, using a control unit with a measurement unit and aperture to stabilize illuminance and extend lamp life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the light source operates at maximum power, then the illuminance intensity is sufficient for exposure, but the lamp life is reduced
Solution Approach 1:
The light source output is dynamically adjusted based on real-time illuminance measurements. The control unit continuously monitors the illuminance and modulates the light source power accordingly, transitioning from static maximum power operation to dynamic adaptive operation, thereby extending lamp life while maintaining sufficient exposure illuminance
Solution Approach 2:
A feedback control system is implemented where the control unit measures the actual illuminance and compares it with the target illuminance, then adjusts the light source output to eliminate the deviation. This closed-loop feedback mechanism ensures consistent exposure quality while operating the light source at optimized power levels, preventing excessive power consumption and heat generation that would reduce lamp life
2Productivity
If the light source operates at maximum power, then the exposure process is efficient, but the heat generation increases
Solution Approach 1:
The control unit continuously measures illuminance and adjusts light source power in real-time to maintain target exposure efficiency. This feedback control prevents unnecessary high-power operation, thereby reducing heat generation while preserving exposure productivity
Solution Approach 2:
The light source operating parameters (power output) are dynamically changed based on measured illuminance conditions. By adjusting the power parameter to match actual exposure needs rather than operating at fixed maximum power, the system maintains productivity while reducing thermal load and heat generation
3Duration of action of stationary object
If the light source output is reduced to extend lamp life, then the lamp life increases, but the illuminance stability may deteriorate
Solution Approach 1:
The control unit implements continuous feedback control by measuring illuminance and adjusting light source power to maintain target illuminance levels. This active compensation for luminance intensity changes ensures illuminance stability even when operating at reduced power levels to extend lamp life
Solution Approach 2:
The patent replaces passive mechanical operation (fixed power settings) with active electronic control (PWM or voltage regulation). This substitution enables precise, rapid adjustments to light source output, maintaining illuminance stability through electronic feedback control rather than relying on stable mechanical operation at fixed power
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method extends the life of the light source by stabilizing illuminance and reducing heat generation, achieving a lamp life of over 6000 hours compared to the conventional 3000 hours, while maintaining consistent exposure quality.
Implementation Method 1
a measurement unit configured to measure illuminance values according to output values of the light source
Data Source
AI summary
The inventive concept provides an edge exposure apparatus for performing an edge exposing process by irradiating a light at an edge region of a substrate. The edge exposure apparatus includes a support unit configured to support the substrate; a light irradiation unit having a light source for irradiating the light on the substrate; and a control unit configured to control an output of the light source, and wherein the control unit comprises: a measurement unit configured to measure illuminance values according to the outputs of the light source; and an output control unit configured to set a reference illuminance value among the measured illuminance values by the measurement unit and to control the output of the light source based on the set reference illuminance value.