Edge Ring Dynamic Alignment via Robot Position Offsets
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Solution Overview
Problem
Accurate alignment of edge rings on substrate supports in substrate processing systems is challenging due to changes in the center position of the substrate support during maintenance and calibration, requiring additional hardware and manual intervention, which can lead to reduced accuracy and increased complexity.
Innovation Solution
A system and method that utilize a robot and imaging device to determine the alignment of the edge ring by calculating offsets between initial and final positions, allowing for dynamic alignment and automatic shifting to a centered position, reducing the need for manual calibration and additional hardware.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment methods are used to position the edge ring on the substrate support, then the alignment process can be performed with simple equipment, but the alignment accuracy decreases and the process becomes more complex requiring additional hardware
Solution Approach 1:
The patent replaces manual mechanical alignment methods with an automated vision-based system. The imaging device captures images of the edge ring and substrate support, and a processing system automatically calculates alignment offsets and determines centered positions, eliminating the need for manual intervention and additional alignment hardware while improving measurement precision
Solution Approach 2:
The patent uses imaging to create a digital copy or representation of the physical alignment state. By capturing images and processing them to determine positions and offsets, the system creates a virtual model of the alignment that can be analyzed and adjusted without physically manipulating the components, thereby improving accuracy without adding hardware complexity
2Manufacturing precision
If additional hardware is added to improve edge ring alignment, then alignment accuracy may improve, but the system complexity and cost increase
Solution Approach 1:
The imaging device and processing system serve multiple functions: they capture images of the edge ring, determine the ring's position, calculate alignment offsets, and identify the centered position. This multi-functional approach improves manufacturing precision without requiring separate dedicated hardware for each function, thereby avoiding increased system complexity
Solution Approach 2:
The system uses the existing imaging infrastructure and processing capabilities to perform alignment measurements and calculations autonomously. The processing system automatically analyzes the captured images, computes offsets, and determines centered positions without requiring additional specialized alignment hardware or manual intervention, achieving high precision while maintaining system simplicity
3Productivity
If manual calibration procedures are used for edge ring alignment, then the system can operate with basic equipment, but human error increases and productivity decreases
Solution Approach 1:
The system captures images of the edge ring and substrate support, processes these images to determine actual positions and offsets, and uses this feedback information to automatically calculate the centered position. This closed-loop feedback mechanism eliminates human error in alignment determination and enables rapid, reliable calibration without requiring manual procedures
Solution Approach 2:
The patent replaces manual calibration procedures with an automated image-based system. The processing system automatically analyzes captured images, calculates alignment offsets, and determines centered positions, eliminating human intervention entirely. This substitution improves both productivity by automating the process and reliability by removing human error from the alignment determination
Data Source
AI summary
A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and determine a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support. An edge ring position module configured to determine a centered position of the edge ring relative to the substrate support based on offsets between the plurality of first positions and the plurality of second positions.