Edge Ring Calibration Jig for Fast Precise Chamber Alignment
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Solution Overview
Problem
The existing methods for replacing edge rings in process chambers are time-consuming due to tight tolerances, leading to mispositioning and increased downtime during installation, which affects plasma uniformity and processing yield in substrate processing, such as semiconductor and display panel manufacturing.
Innovation Solution
A calibration jig with a transparent plate, sensors, and contact pads is used to position and level the height-adjustable edge ring relative to a reference surface, allowing for precise calibration and alignment using drive motors and sensors to calculate and store offset values, thereby facilitating quick and accurate installation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional manual positioning methods are used for edge ring installation, then installation precision can be achieved through operator skill, but installation time becomes excessively long (several hours)
Solution Approach 1:
The patent replaces manual mechanical positioning with an automated optical-mechanical system. Sensors detect the position of the edge ring relative to the substrate support assembly, and a controller automatically calculates and commands motorized adjustments to achieve precise positioning. This substitution of manual mechanical operations with automated sensor-based positioning resolves the contradiction by providing both high precision and rapid installation.
Solution Approach 2:
The calibration jig enables the edge ring positioning system to self-calibrate and self-position without external intervention. The sensors automatically detect misalignment, the controller computes correction values, and the motors execute positioning adjustments autonomously. This self-service capability eliminates time-consuming manual operations while maintaining precision requirements.
2Reliability
If tight tolerances are applied to edge ring positioning, then plasma uniformity is improved, but positioning difficulty increases leading to binding and mispositioning
Solution Approach 1:
The patent implements a feedback-based positioning system where sensors continuously monitor the edge ring position relative to the substrate support assembly. The controller receives sensor data, compares it against target positioning parameters, and automatically commands motorized adjustments to eliminate positioning errors. This closed-loop feedback mechanism ensures tight tolerances are met without manual positioning difficulty or binding issues.
Solution Approach 2:
The system replaces difficult manual positioning operations with automated motorized positioning controlled by sensor feedback. The motors precisely adjust the edge ring position based on controller commands, eliminating the binding and mispositioning problems associated with tight manual tolerances while maintaining the required plasma uniformity.
3Duration of action of stationary object
If edge rings are made movable to account for erosion, then extended operational life is achieved, but positioning complexity and mispositioning risk increase
Solution Approach 1:
The patent implements a dynamic positioning system where the edge ring can move relative to the substrate support assembly to accommodate erosion. Motors provide controlled movement along the radial direction, and sensors continuously track position changes. The controller adjusts positioning commands based on real-time sensor feedback, enabling the system to adapt to erosion while maintaining precise positioning through automated control rather than complex mechanical structures.
Solution Approach 2:
The system replaces complex mechanical positioning mechanisms with automated motor-sensor-controller assemblies. The motors provide controlled movement to accommodate erosion, while sensors and controllers manage positioning complexity through electronic control algorithms. This substitution reduces mechanical complexity while enabling extended operational life through controlled adaptability to erosion.
Data Source
AI summary
Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.