Edge Ring Capacitance Measurement for Precise Chamber Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing measurement methods fail to accurately determine the capacitance between a measuring instrument and an edge ring in a processing system, particularly due to the lack of a reliable method for acquiring precise capacitance values in a controlled environment.
Innovation Solution
A measurement method and system that utilize a measuring instrument with sensor electrodes and a conductive film on the edge ring to calculate capacitance values, where the measuring instrument is transported to a region surrounded by the edge ring, allowing for accurate capacitance measurement by facing sensor electrodes with the conductive film.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a measuring instrument is used to measure capacitance between the measuring instrument and an edge ring, then measurement precision is improved, but the device complexity increases due to the need for transport devices and controlled chamber environment
Solution Approach 1:
A conductive film is formed on the edge ring to serve as an intermediary element that enables accurate capacitance measurement. The conductive film creates a well-defined capacitive structure between the sensor electrode and the edge ring, allowing precise measurement of capacitance values that correspond to distances between the measuring instrument and the edge ring
2Measurement precision
If the measuring instrument is transported to a region surrounded by the edge ring using a transport device, then measurement precision is improved, but the loss of time increases due to the transportation and positioning process
Solution Approach 1:
The conductive film is formed on the edge ring in advance before the capacitance measurement takes place. This preliminary action prepares the measurement structure beforehand, so that when the measuring instrument is positioned, the capacitance measurement can be performed immediately without additional preparation time, thus reducing the overall loss of time while maintaining measurement precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise acquisition of capacitance values corresponding to distances between the measuring instrument and the edge ring, facilitating accurate positional alignment and adjustment within the processing system.
Implementation Method 1
acquire measured values indicating a capacitance between the measuring instrument and the edge ring
Data Source
AI summary
A measurement method according to an exemplary embodiment acquires a measured value indicating a capacitance between a measuring instrument and an edge ring in a chamber. The measuring instrument includes a base substrate and a sensor electrode provided on the base substrate. The method includes holding, on a stage in the chamber, the edge ring having a conductive film formed on a surface thereof. The method includes transporting the measuring instrument to a region on the stage which is surrounded by the edge ring. The method includes acquiring the measured value indicating the capacitance between the measuring instrument and the edge ring having the conductive film by using the measuring instrument transported to the inner side of the region.