Edge Ring Carrier Transfer for In-Situ Chamber Replacement
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Solution Overview
Problem
The existing methods for replacing edge rings in processing chambers, such as etch chambers, are time-consuming and require venting the chambers, leading to prolonged downtime and reduced processing uniformity due to edge ring deterioration.
Innovation Solution
A carrier system with a semi-circular plate and arcuate support structures, along with a robot blade, enables the transfer and replacement of edge rings within processing chambers without disassembly, utilizing lift pins and substrate support structures to position and secure the edge rings accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If edge rings are replaced by opening processing chambers for operator access, then edge ring replacement can be performed, but processing downtime increases significantly (up to 24 hours) due to venting and reassembly
Solution Approach 1:
The system divides the edge ring replacement process into independent modular components: a robot blade with a carrier that can be inserted through the slit valve door, lift pins for precise positioning, and a carrier that holds the edge ring. This segmentation allows replacement without opening the entire chamber, reducing downtime from 24 hours to minutes while maintaining ease of replacement through standardized interfaces.
Solution Approach 2:
The patent introduces a robot blade as an intermediary tool that transfers the carrier containing the edge ring from the external environment into the processing chamber through the slit valve door. This intermediary mechanism enables edge ring replacement without direct operator access to the chamber interior, eliminating the need for full chamber opening and venting procedures.
2Reliability
If edge rings are used to protect electrostatic chuck surfaces, then substrate processing uniformity is maintained, but edge rings deteriorate over time requiring replacement
Solution Approach 1:
The system transitions from static edge rings that remain in place until deterioration to a dynamic replacement system where edge rings can be quickly swapped out. The robot blade with carrier and lift pins enables the edge ring to be replaced on-demand based on actual wear conditions rather than fixed schedules, maintaining processing uniformity while optimizing the service life utilization of each edge ring.
Solution Approach 2:
The carrier is pre-loaded with a new edge ring outside the processing chamber. When replacement is needed, the pre-prepared carrier is transferred into the chamber and the new edge ring is installed without delay. This preliminary preparation eliminates waiting time for edge ring replacement and ensures immediate restoration of processing uniformity.
3Ease of operation
If processing chambers are vented for edge ring replacement, then operator access is enabled, but chamber repressurization and system stabilization time increases downtime
Solution Approach 1:
The robot blade serves as an intermediary that performs the edge ring replacement task without requiring operator entry into the chamber. The slit valve door acts as an intermediary access point that allows the robot blade to enter and exit while maintaining chamber integrity. This eliminates the need for full chamber venting and repressurization cycles, preserving productivity while enabling maintenance operations.
Solution Approach 2:
The system enables self-service edge ring replacement where the robot blade autonomously performs the replacement task. The lift pins automatically position the carrier, and the system can operate without continuous operator intervention. This reduces the need for operator access and maintains chamber uptime while still allowing operator oversight when needed.
Data Source
AI summary
Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.