Plasma Chamber Edge Ring Clamping for Adhesive Loss and Arcing
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Solution Overview
Problem
In plasma chambers, existing adhesive systems fail to securely maintain edge rings during high-temperature processes due to reduced adhesive force, leading to potential substrate processing errors from ring displacement.
Innovation Solution
The implementation of edge rings with curved edges and screw holes for secure attachment to support rings, along with pneumatic mechanisms for hold-down rods, ensures fixed positioning even when adhesive force is reduced, and facilitates easy removal for maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If adhesives are used to secure the edge ring to the support ring, then the edge ring can be initially attached, but the adhesive force is reduced due to high temperature cycles and the gel can disintegrate over time
Solution Approach 1:
The securing mechanism is divided into multiple independent components: an adhesive layer for initial attachment and multiple fasteners (screws, bolts, or clips) that penetrate through the edge ring to mechanically secure it to the support ring. This segmentation ensures that if the adhesive degrades, the mechanical fasteners maintain the secure connection.
Solution Approach 2:
The adhesive is applied first to facilitate initial attachment and alignment of the edge ring to the support ring, followed by the installation of mechanical fasteners that provide long-term securement. This preliminary action allows for easy positioning before permanent mechanical fixation.
2Reliability
If multiple fasteners are used to secure the edge ring to the support ring, then the edge ring remains fixed during processing, but the device complexity increases
Solution Approach 1:
The fastening system is designed to be universal, accommodating multiple types of fasteners (screws, bolts, or clips) that can be selected based on specific application requirements. The support ring includes through-holes or recesses that work with various fastener types, allowing a single design to serve multiple functions and reduce overall system complexity.
3Ease of manufacture
If the edge ring has sharp edges, then the manufacturing is simpler, but arcing occurs when plasma is formed within the plasma chamber
Solution Approach 1:
The edges of the edge ring are rounded or curved instead of sharp, which eliminates arcing when plasma is formed in the chamber. This curvature modification maintains ease of manufacture through standard rounding processes while eliminating the harmful arcing effect that would occur with sharp edges.
4Manufacturing precision
If the edge ring is securely fastened during processing, then processing accuracy is maintained, but the ease of removal for maintenance decreases
Solution Approach 1:
The fastening system is designed to be dynamically adjustable, allowing the edge ring to be securely fastened during processing operations to maintain precision, while enabling easy removal when maintenance or replacement is required. The mechanical fasteners can be quickly loosened and removed without permanent attachment.
Data Source
AI summary
Systems and methods for securing an edge ring to a support ring are described. The edge ring is secured to the support ring via multiple fasteners that are inserted into a bottom surface of the edge ring. The securing of the edge ring to the support ring provides stability of the edge ring during processing of a substrate within a plasma chamber. In addition, the securing of the edge ring to the support ring secures the edge ring to the plasma chamber because the support ring is secured to an insulator ring, which is connected to an insulator wall of the plasma chamber. Moreover, the support ring and the edge ring are pulled down vertically using one or more clasp mechanisms during the processing of the substrate and are pushed up vertically using the clasp mechanisms to remove the edge ring and the support ring from the plasma chamber.