Edge Ring Distance Sensing for Uniform Thermal Processing
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Solution Overview
Problem
During rapid thermal annealing, thermal expansions and contractions of edge components in thermal processing chambers cause position shifts, leading to non-uniform temperatures and material processing inconsistencies, necessitating accurate measurement and correction of edge ring positions to ensure temperature and material uniformity.
Innovation Solution
A thermal processing chamber system equipped with distance sensors mounted on the sidewalls to measure the edge ring distance, determining center position shifts and adjusting the landing position of substrates using a rotor and robotic alignment to maintain uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If thermal processing is performed without measuring edge ring position, then the processing system is simpler and faster to operate, but temperature uniformity and material processing consistency deteriorate due to thermal expansion-induced position shifts
Solution Approach 1:
The patent replaces complex mechanical measurement systems with optical sensors (laser displacement sensors) that use light reflection to measure edge ring position. This substitution maintains high measurement precision while reducing mechanical complexity and improving response speed for real-time temperature uniformity control during thermal processing
Solution Approach 2:
The patent uses optical reflection to create a virtual copy of the edge ring position data without physical contact. The laser displacement sensor captures position information through light reflection, enabling non-intrusive measurement that preserves temperature uniformity while providing accurate position data for control adjustments
2Manufacturing precision
If edge ring position is measured and corrected in real-time, then temperature and material uniformity improve, but measurement and processing time increase
Solution Approach 1:
The patent implements continuous real-time measurement of edge ring position using laser displacement sensors during the entire thermal processing cycle. This continuous monitoring enables immediate detection and correction of position shifts, ensuring consistent material processing without interrupting the processing flow or requiring additional measurement time
Solution Approach 2:
The patent establishes a closed-loop feedback system where laser displacement sensors continuously measure edge ring position, the controller processes this data to determine position shifts, and the system automatically adjusts substrate placement or heating parameters. This rapid feedback mechanism corrects deviations in real-time, maintaining material processing consistency without adding significant time overhead
3Measurement precision
If distance sensors are mounted on sidewalls pointing at edge ring, then position measurement accuracy improves, but chamber design complexity and sensor mounting requirements increase
Solution Approach 1:
The patent integrates the laser displacement sensor mounting structure into the existing chamber sidewall framework, allowing the same structural elements to serve both as chamber boundaries and as sensor mounting platforms. This multi-functional design achieves precise edge ring position measurement while minimizing additional structural complexity and avoiding separate mounting hardware
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures accurate and efficient alignment of substrates, promoting temperature and material uniformity, increasing throughput, reducing costs, and minimizing machine downtime by real-time measurement and adaptation of edge ring position changes.
Implementation Method 1
one or more distance sensors mounted to the one or more sidewalls of the chamber body. Each distance sensor is directed toward the outer surface of the edge ring to measure a distance between the outer surface of the edge ring and the respective distance sensor
Implementation Method 2
heat a first substrate disposed on an edge ring in a processing volume of a chamber body to a first temperature using a plurality of heat lamps
Implementation Method 3
cool the first substrate to a second temperature that is lesser than the first temperature
Data Source
AI summary
Aspects of the present disclosure relate to apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers. In one example, the distance measured is used to determine a center position shift of the edge ring.