Edge Ring Height Compensation for Mid-Ring Erosion
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Solution Overview
Problem
Mid-ring erosion in substrate processing systems leads to non-uniform etching and stroke loss, necessitating frequent chamber openings for replacement, which increases costs and reduces processing efficiency.
Innovation Solution
A method to compensate for mid-ring erosion by automatically tuning the height of the top ring based on the erosion rates of both the top and mid-rings, using a tuning factor calculated from etch rate data and RF hour counts, allowing continuous operation without opening the processing chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the mid-ring is replaced frequently to maintain etch uniformity, then etch uniformity is improved, but processing efficiency deteriorates due to frequent chamber openings
Solution Approach 1:
The system implements a feedback mechanism where the controller continuously monitors the erosion of the top ring and mid-ring through etch rate data and RF hour counts. Based on this feedback, the controller automatically adjusts the height of the top ring to compensate for mid-ring erosion, eliminating the need for frequent manual replacements and chamber openings while maintaining etch uniformity.
Solution Approach 2:
The system enables self-service operation where the controller automatically tunes the top ring height based on monitored erosion conditions. This self-adjusting mechanism allows the system to maintain optimal performance without requiring frequent manual intervention or chamber openings, thus improving processing efficiency while preserving etch uniformity.
2Manufacturing precision
If the top ring height is manually adjusted frequently, then etch uniformity is improved, but device complexity increases due to manual intervention requirements
Solution Approach 1:
The system enables self-service operation where the controller automatically tunes the top ring height based on monitored erosion conditions. This self-adjusting mechanism allows the system to maintain optimal performance without requiring frequent manual intervention or chamber openings, thus improving processing efficiency while preserving etch uniformity.
Solution Approach 2:
The patent replaces manual mechanical adjustment operations with an automated control system. The controller uses electronic monitoring of etch rates and RF hour counts to automatically drive the top ring height adjustment mechanism, substituting complex manual procedures with a simpler automated system that reduces operational complexity.
3Productivity
If the mid-ring is not replaced, then processing efficiency is improved by avoiding chamber openings, but etch uniformity deteriorates due to mid-ring erosion
Solution Approach 1:
The top ring serves as an intermediary component that compensates for mid-ring erosion. By automatically adjusting the top ring height in response to mid-ring erosion conditions, the system maintains etch uniformity without requiring mid-ring replacement or chamber openings, thus preserving both processing efficiency and etch quality.
Solution Approach 2:
The system implements a feedback mechanism where the controller continuously monitors the erosion of the top ring and mid-ring through etch rate data and RF hour counts. Based on this feedback, the controller automatically adjusts the height of the top ring to compensate for mid-ring erosion, eliminating the need for frequent manual replacements and chamber openings while maintaining etch uniformity.
4Reliability
If consumable replacement is performed frequently, then reliability is improved by maintaining optimal performance, but loss of time increases due to chamber openings
Solution Approach 1:
The system implements a feedback mechanism where the controller continuously monitors the erosion of the top ring and mid-ring through etch rate data and RF hour counts. Based on this feedback, the controller automatically adjusts the height of the top ring to compensate for mid-ring erosion, eliminating the need for frequent manual replacements and chamber openings while maintaining etch uniformity.
Solution Approach 2:
The automated compensation system enables continuous operation without interrupting the processing chamber. By continuously monitoring erosion conditions and automatically adjusting the top ring height, the system maintains optimal performance consistency throughout extended operation periods without requiring downtime for consumable replacement.
Data Source
AI summary
A method includes arranging a first edge ring around a pedestal and a second edge ring around the pedestal under the first edge ring, determining first and second number of hours for which the first and second edge rings are exposed to RF power supplied during substrate processing, determining first and second rates at which the first and second edge rings erode during substrate processing, determining first and second amounts by which to compensate a height of the first edge ring based on the first and second number of hours and the first and second rates, compensating the height of the first edge ring based on erosion of the first and second amounts, and moving the first edge ring relative to the pedestal during substrate processing according to the compensated height, which is equal to a sum of the first and second amounts.