Edge Ring Fin Structure for Thermal Uniformity
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Solution Overview
Problem
Traditional edge rings used in substrate processing chambers cause temperature non-uniformity around the substrate's outer edge region, especially during rapid heating, leading to significant temperature variations.
Innovation Solution
An edge ring with a ring-shaped body and a fin extending radially inward, featuring a surface area increasing structure that enhances thermal conductivity and reduces radial and azimuthal deformation, while positioning the supporting surface close to the center of gravity to minimize bucking and ensure uniform heating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a traditional edge ring is used to support the substrate, then the substrate can be held in position during thermal processing, but temperature non-uniformity occurs around the outer edge region of the substrate
Solution Approach 1:
The patent introduces a fin structure that extends vertically from the edge ring body, adding a third dimension (height) to the originally planar ring structure. This vertical extension increases the surface area for thermal radiation without significantly increasing the horizontal footprint, thereby improving temperature uniformity at the substrate edge while maintaining positional support functionality
Solution Approach 2:
The patent modifies the geometric parameters of the edge ring by adding a fin with specific dimensions (height, thickness, and radial extension). This structural parameter change increases the thermal mass and surface area of the edge ring, enabling it to act as a more effective heat reservoir and radiator, thus reducing temperature non-uniformity during rapid heating cycles
2Productivity
If the substrate is heated at a rapid rate, then processing efficiency is improved, but temperature variation around the edge region increases significantly
Solution Approach 1:
The fin structure acts as a pre-positioned thermal buffer that absorbs and redistributes thermal energy during rapid heating. The increased thermal mass of the fin provides a heat reservoir that cushions against sudden temperature changes at the substrate edge, preventing excessive temperature variations even when the substrate is heated at high rates
3Ease of manufacture
If the edge ring structure is simplified, then manufacturing ease is improved, but temperature control capability deteriorates
Solution Approach 1:
The edge ring is segmented into distinct functional components: a ring-shaped body for structural support and substrate positioning, and a fin structure for enhanced thermal management. This segmentation allows each component to be optimized for its specific function while maintaining relative manufacturing simplicity through modular design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces temperature gradients and deformation of the edge ring, achieving improved temperature uniformity across the substrate during thermal processing, with a reduction in edge ring deformation by about 80% and standard deviation of substrate temperature by approximately 10°C.
Implementation Method 1
The surface area increasing structure may include a fin extending vertically from a planar ring body. The fin increases the ratio of exposed surface area and mass in the edge ring, thus, reducing radial temperature gradient during heating.
Implementation Method 2
radiant energy source disposed above or below the substrate projects thermal energy towards the substrate
Data Source
AI summary
Embodiments of the present invention provide an edge ring for supporting a substrate with increased temperature uniformity. More particularly, embodiments of the present invention provide an edge ring having one or more fins formed on an energy receiving surface of the edge ring. The fins may have at least one sloped side relative to a main body of the edge ring.