Edge Ring Groove Design for Thermal Uniformity in Substrate Heating
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Solution Overview
Problem
Temperature non-uniformity during heat treatment processes, particularly in rapid thermal processing, leads to quality issues and reliability problems in micro device structures, as well as potential substrate twisting and warpage due to temperature deviations between the central and edge regions of substrates.
Innovation Solution
An edge ring with a ring-shaped main body, including a substrate support part, an outer band, an outer sidewall, and a groove part, which induces a laminar flow of process gas to ensure uniform heating and minimize temperature deviations, combined with a coating layer made of oxide elements to enhance mechanical stiffness and thermal conductivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the substrate contacts the edge ring directly for support during heat treatment, then the substrate is stably supported, but temperature non-uniformity occurs between the central region and edge region of the substrate
Solution Approach 1:
A gas layer is introduced as an intermediary between the substrate and edge ring. The gas supply unit supplies process gas that forms a gas film between the substrate bottom surface and edge ring top surface, allowing thermal isolation while maintaining mechanical support. This mediator prevents direct thermal contact that causes edge heating while preserving substrate stability.
Solution Approach 2:
The patent utilizes gas pressure and flow dynamics to create a suspended support system. The gas supply unit introduces process gas at controlled pressure beneath the substrate, creating a pneumatic cushion that supports the substrate without direct solid contact. This pneumatic mechanism enables thermal isolation while maintaining positional stability.
2Productivity
If process gas flows in one direction across the substrate, then the gas supply efficiency is improved, but temperature deviation between central and edge regions increases
Solution Approach 1:
The gas supply is segmented into multiple zones with different flow characteristics. The gas supply unit distributes process gas through multiple pathways - some flowing horizontally across the substrate for efficient transport, and others flowing vertically or at angles to provide uniform thermal distribution. This segmentation allows simultaneous optimization of gas supply efficiency and temperature uniformity.
Solution Approach 2:
Different regions of the substrate receive gas with different flow characteristics tailored to local requirements. The gas supply unit creates localized flow patterns - higher velocity flows in regions needing efficient gas transport and lower velocity or multi-directional flows in regions needing uniform heating. This local optimization resolves the contradiction between overall gas supply efficiency and local temperature uniformity.
3Power
If the edge ring is made of material with high thermal conductivity for heat exchange, then heat transfer efficiency is improved, but temperature control precision deteriorates due to sensitive temperature changes
Solution Approach 1:
The gas layer serves as a thermal intermediary with controllable thermal resistance. By adjusting gas pressure and flow rate, the thermal conductivity of the gas medium can be tuned to provide appropriate heat transfer - sufficient for process requirements but limited enough to prevent excessive temperature sensitivity. This intermediary layer decouples the thermal coupling between edge ring and substrate.
Solution Approach 2:
The patent dynamically adjusts gas pressure and flow rate parameters to control the thermal characteristics of the gas medium. By changing these parameters, the effective thermal conductivity between substrate and edge ring can be modulated - higher flow rates reduce thermal coupling for better temperature control, while lower flow rates improve heat transfer efficiency when needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The edge ring design improves temperature uniformity across the substrate, reducing the risk of twisting and warpage, and enhancing the yield of products by effectively distributing heat energy and maintaining mechanical stability during heat treatment processes.
Implementation Method 1
a coating layer made of oxide of any one of elements constituting the main body and coated on at least a portion of the main body
Implementation Method 2
a groove part provided between the substrate support part and the outer band... induces a laminar flow of process gas
Implementation Method 3
a heating source disposed above the substrate to heat a top surface of the substrate
Data Source
AI summary
Provided are an edge ring and a heat treatment apparatus having the same. The edge ring includes a main body having a ring shape. The main body includes a substrate support part configured to support an edge of a bottom surface of a substrate, an outer band provided outside the substrate support part and having a top surface that is higher than a top surface of the substrate support part and is parallel to a top surface of the substrate supported by the substrate support part, an outer sidewall provided outside the outer band, and a groove part provided between the substrate support part and the outer band.