Edge Ring Replacement Without Vacuum Break Using Image Sensor
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Solution Overview
Problem
In wafer processing systems, replacing a damaged edge ring requires breaking the vacuum of the process chamber, leading to time-consuming processes and reduced productivity, and precise alignment is crucial for yield but challenging.
Innovation Solution
A substrate processing system with a transfer robot and image sensor that allows for the precise replacement and alignment of edge rings without breaking the vacuum, using a lift mechanism and disk-shaped image sensor to inspect and correct the alignment of the edge ring.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the vacuum of the process chamber is broken to replace the damaged edge ring, then the edge ring can be replaced, but the replacement process becomes time-consuming and productivity decreases
Solution Approach 1:
The patent applies the inert environment principle by maintaining the vacuum state (inert atmosphere) in the process chamber during edge ring replacement. The transfer robot performs the replacement operation without breaking the vacuum, allowing the chamber to remain in its controlled environment throughout the maintenance process, thus avoiding time loss from vacuum breaking and reestablishment
Solution Approach 2:
The system implements self-service through automated edge ring replacement using a transfer robot that can autonomously remove damaged edge rings and install new ones without manual intervention. The robot retrieves edge rings from a storage module and places them on the substrate support, enabling the system to perform its own maintenance while maintaining productivity
2Manufacturing precision
If precise alignment of the edge ring is required to influence process yield, then alignment accuracy must be high, but the alignment process becomes more complex and time-consuming
Solution Approach 1:
The patent replaces complex mechanical alignment systems with optical sensing. Image sensors capture images of the edge ring position, and a controller automatically calculates and adjusts alignment based on these images. This substitution of mechanical alignment mechanisms with optical-mechanical control reduces system complexity while achieving high precision
Solution Approach 2:
The system uses image copying to determine edge ring alignment. Image sensors create optical copies (images) of the edge ring position, which are then analyzed by the controller to determine precise alignment status. This copying approach simplifies the measurement process compared to direct mechanical measurement while maintaining high accuracy
3Ease of repair
If the vacuum chamber is broken for edge ring replacement, then the damaged part can be replaced, but time loss increases and process yield decreases
Solution Approach 1:
The patent maintains the vacuum (inert environment) throughout the edge ring replacement process. The transfer robot performs all replacement operations inside the vacuum chamber without breaking the vacuum seal, eliminating the time required to break and reestablish vacuum, thus significantly reducing total replacement time
Solution Approach 2:
The system ensures continuous operation by maintaining the vacuum state uninterrupted during edge ring replacement. The chamber remains under vacuum throughout the entire replacement process, allowing the system to avoid idle time associated with vacuum cycling and enabling seamless continuation of processing operations
Data Source
AI summary
A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.