Edge Ring Replacement Jig for Precise Plasma Chamber Alignment
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Solution Overview
Problem
In plasma processing systems, replacing the edge ring and cover ring is challenging due to inaccuracies in transfer devices, leading to misalignment and improper placement on the substrate support, which affects uniform processing results.
Innovation Solution
The plasma processing system incorporates an elevating mechanism with pins and a control device to accurately position and replace the edge ring and cover ring, using a jig and lifters to ensure precise alignment and support, allowing for independent or simultaneous replacement of these rings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If a transfer device is used to replace the edge ring and cover ring, then the replacement process can be automated, but misalignment and improper placement occur due to inaccuracies in the transfer device
Solution Approach 1:
A jig with positioning pins is introduced as an intermediary device between the transfer device and the rings. The positioning pins fit into positioning holes on the substrate support to provide precise alignment references, while the jig itself is held by the transfer device. This mediator resolves the contradiction by enabling automated transfer while ensuring accurate placement through mechanical positioning features.
2Productivity
If the edge ring and cover ring are replaced simultaneously, then replacement time is reduced, but the complexity of the replacement process increases
Solution Approach 1:
The replacement processes for the edge ring and cover ring are merged into a single coordinated operation. The transfer device performs both replacements in one cycle by sequentially delivering each ring to its target position on the substrate support, while the positioning pins provide unified alignment references for both components. This combining approach achieves faster replacement without proportionally increasing complexity.
3Manufacturing precision
If manual intervention is used for ring replacement, then precise placement can be achieved, but replacement time increases and operational complexity increases
Solution Approach 1:
The system is designed to be self-aligning through the jig and positioning pins, which automatically provide correct placement references when the transfer device delivers the rings. The positioning pins fit into positioning holes to self-correct any minor transfer inaccuracies, enabling automated operation to achieve manual-level precision without requiring manual intervention for each placement action.
Data Source
AI summary
A plasma processing system includes a control device. The control device executes raising a lifter to deliver a cover ring supporting an edge ring to the lifter; moving a jig supported by a holder to a space between the cover ring and a substrate support surface/an annular support surface; raising a different lifter to deliver the jig to the different lifter; extracting the holder, and then moving the lifter and the different lifter relatively to deliver the edge ring to the jig; lowering only the lifter to deliver the cover ring to the annular member support surface; moving the holder to a space between the cover ring and the jig, and then lowering the different lifter to deliver the jig to the holder; and extracting the holder from the processing chamber to transfer the jig supporting the edge ring from the processing chamber.