Edge Ring Storage Station for Vacuum-Safe Rotational Alignment
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Solution Overview
Problem
Existing semiconductor wafer processing systems require opening and exposing to atmospheric conditions to replace worn-out edge rings, leading to inefficiencies, contamination risks, and prolonged downtime due to manual handling and misalignment issues during consumable part replacement.
Innovation Solution
A ring storage station is designed to couple with the substrate processing system, allowing for the removal and replacement of worn-out edge rings without breaking vacuum, using a lift pin mechanism and robotic handling to ensure precise alignment and delivery of new consumable parts within a controlled environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate processing system is opened to atmospheric conditions for edge ring replacement, then manual access and replacement is possible, but vacuum is broken causing contamination risks and prolonged downtime
Solution Approach 1:
A robotic end effector serves as an intermediary between the atmospheric environment and the vacuum chamber, enabling edge ring replacement without breaking vacuum. The robot transfers the consumable part through a sealed interface, maintaining the vacuum barrier while facilitating the replacement operation.
Solution Approach 2:
Manual mechanical operations are replaced with an automated robotic system. The robot performs the edge ring replacement through automated positioning and manipulation, eliminating the need to open the vacuum chamber for manual access while maintaining precise control over the replacement process.
2Ease of manufacture
If manual handling is used for edge ring replacement, then simplicity is maintained, but misalignment issues occur reducing manufacturing precision
Solution Approach 1:
Manual alignment operations are replaced with an automated robotic system equipped with positioning capabilities. The robot uses controlled motion and positioning mechanisms to achieve precise alignment of the edge ring with the substrate, eliminating misalignment issues associated with manual handling while maintaining operational simplicity through automation.
3Ease of operation
If the system is opened for consumable part replacement, then access is enabled, but contamination risks increase affecting product quality
Solution Approach 1:
The robotic end effector acts as a sealed intermediary that transfers the edge ring through a vacuum-compatible interface. This allows the replacement operation to proceed without opening the vacuum chamber, thereby eliminating the contamination pathway that would exist with manual access while still enabling full access to the process module.
Solution Approach 2:
The vacuum environment serves as an inert, contamination-free atmosphere throughout the replacement process. By maintaining vacuum conditions and using a sealed robotic interface, the system ensures that no atmospheric contaminants can enter the process chamber during the edge ring replacement operation.
4Manufacturing precision
If automated robotic handling is implemented, then alignment precision is improved, but device complexity increases
Solution Approach 1:
The robotic end effector is designed with multi-functionality, serving both as a gripper for holding the edge ring and as a positioning mechanism for precise alignment. This universal tool approach reduces the need for separate specialized devices, thereby limiting the increase in overall system complexity while achieving high alignment precision.
Data Source
AI summary
A ring storage station used for delivering a consumable part to a substrate processing system includes a housing that includes a base plate and a rotating plate disposed over the base plate. An end-effector opening is disposed at a first side of the housing and a service window opening is disposed at a second side of the housing. A set of finger support structures is connected to the rotating plate. Each finger support structure includes a support column and support fingers disposed thereon. At least two of the set of columns have support fingers with index pins to radially align consumable parts when disposed in the ring storage station. In one configuration, consumable parts may be designed to match the rotation angle engagement to ensure catching the angle alignment between ring storage and process module.