Edge Ring Position Measurement for Uniform Rapid Thermal Annealing

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Solution Overview

Problem

During rapid thermal annealing, thermal expansions and contractions of edge components in thermal processing chambers cause position shifts, leading to non-uniform temperatures and material processing inconsistencies, necessitating accurate measurement and correction of edge ring position to ensure temperature and material uniformity.

Innovation Solution

A thermal processing chamber system equipped with distance sensors mounted on the sidewalls to measure the edge ring distance, determining center position shifts and adjusting the landing position of substrates using a rotor and robotic alignment to maintain uniformity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If thermal processing is performed using heat lamps and edge ring support, then substrate heating and processing is achieved, but thermal expansion and contraction causes edge ring position shift leading to temperature non-uniformity

Engineering Contradiction:

Improvetemperature uniformityVSAvoidposition stability

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The system performs preliminary measurement of edge ring position using distance sensors before thermal processing begins. The measured position data is used to calculate compensation values that are applied in advance to correct the landing position, preventing temperature non-uniformity caused by thermal expansion and contraction during processing.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system continuously monitors edge ring position using distance sensors mounted on chamber sidewalls. The measured position feedback is processed to determine center position shifts, and compensation values are calculated and applied to adjust the landing position, creating a closed-loop control system that maintains temperature uniformity despite thermal expansion and contraction.

Inventive Principle:

Principle #23Feedback

2Manufacturing precision

If edge ring position measurement and correction is implemented, then temperature and material uniformity is improved, but device complexity increases due to additional sensors and control systems

Engineering Contradiction:

Improvematerial uniformityVSAvoidmeasurement and control system complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system replaces complex mechanical positioning adjustment mechanisms with a computational approach. Distance sensors measure edge ring position, and a controller calculates compensation values based on measured deviations. This substitution of mechanical adjustment with computational correction simplifies the overall system while achieving high precision material uniformity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system introduces distance sensors as intermediary measurement devices between the edge ring and the control system. These sensors provide position data that serves as an intermediary input for calculating compensation values, enabling precise control of landing position without requiring direct mechanical intervention or complex sensor arrays.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Measurement precision

If distance sensors are mounted on sidewalls to measure edge ring position, then position measurement accuracy is improved, but chamber space and device complexity increase

Engineering Contradiction:

Improveedge ring position measurement accuracyVSAvoidchamber space

Core Design Contradiction:

Measurement precisionVSArea of stationary object

Solution Approach 1:

The measurement system is segmented by mounting individual distance sensors at discrete locations on the chamber sidewalls rather than using a single comprehensive measurement device. This segmentation allows for targeted measurement of edge ring position at critical points, achieving high measurement precision while minimizing the space required for measurement infrastructure.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively maintains temperature and material uniformity by accurately measuring and correcting edge ring position shifts, enhancing processing accuracy, efficiency, and reducing downtime.

Implementation Method 1

heat a first substrate disposed on an edge ring in a processing volume of a chamber body to a first temperature using a plurality of heat lamps

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

cool the first substrate to a second temperature that is lesser than the first temperature

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

rotate the edge ring using a rotor

Methodology Applied

Scientific EffectMechanical rotation:

Implementation Method 4

measure a distance between a distance sensor and an outer surface of the edge ring

Methodology Applied

Scientific EffectOptical detection:

Data Source

PatentUS11915953B2Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers

Publication Date: 2024.02.27 APPLIED MATERIALS INC

AI summary

Aspects of the present disclosure relate to apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers. In one example, the distance measured is used to determine a center position shift of the edge ring.