Edge Ring Thermal Breaks for Substrate Processing Warpage
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Solution Overview
Problem
Conventional edge rings in substrate processing chambers often warp due to excessive heating, leading to decreased tool uptime and increased particle generation when they require replacement.
Innovation Solution
An edge ring with an annular body containing thermal breaks disposed perpendicular to its centerline, combined with a gas distribution system and thermal barrier coatings, to dissipate heat and prevent overheating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the edge ring is exposed to thermal energy during substrate processing, then the substrate can be heated for deposition or etch processes, but the edge ring becomes too hot and warps
Solution Approach 1:
The edge ring is segmented into multiple sections with thermal breaks (gaps or low-conductivity material regions) positioned at specific locations around the annular body. This segmentation interrupts the thermal conduction path, allowing the substrate to be heated while preventing excessive heat accumulation in the edge ring, thereby maintaining its shape stability.
2Reliability
If the edge ring extends below the substrate to protect the supporting structure, then structural protection is provided, but the edge ring is exposed to more thermal energy and overheats
Solution Approach 1:
Thermal break regions act as intermediary elements within the edge ring structure, serving as thermal insulators that mediate between the heated substrate and the edge ring body. These intermediaries allow the edge ring to extend below the substrate for structural protection while preventing direct thermal transfer that would cause overheating.
3Strength
If the edge ring is made from a single continuous material for structural integrity, then mechanical strength is maintained, but thermal conduction causes warping
Solution Approach 1:
The edge ring employs a composite structure combining high-strength material regions with thermal break regions (low thermal conductivity material). This composite design maintains overall structural integrity and strength while the thermal break regions prevent excessive heat conduction, thereby preventing warping and maintaining dimensional stability during thermal processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the risk of warpage and particle generation by dispersing heat laterally, maintaining tool uptime and improving processing chamber efficiency.
Implementation Method 1
Disposed within the annular body of the edge ring is a plurality of thermal breaks. The plurality of thermal breaks is disposed perpendicular to a center line of the annular body... effectively reduces the risk of warpage and particle generation by dispersing heat laterally
Data Source
AI summary
An edge ring and process for fabricating an edge ring are disclosed herein. In one embodiment, an edge ring includes an annular body and a plurality of thermal breaks disposed within the annular body. The thermal breaks are disposed perpendicular to a center line of the annular body of the edge ring.