Edge Ring Assembly Handling for Atmosphere-Free Plasma Replacement
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Solution Overview
Problem
In plasma processing systems, replacing the edge ring and its associated heat transfer sheet requires exposing the processing chamber to the atmosphere, leading to prolonged downtime and inefficiencies due to the need for manual replacement and deterioration of the heat transfer sheet.
Innovation Solution
A plasma processing system with a pressure-reducible transfer apparatus allows for the replacement of the edge ring and heat transfer sheet without exposing the processing chamber to the atmosphere, using a delivery structure to vertically move the edge ring assembly between chambers, supported by a heat transfer sheet, and employing a transferer to transfer the assembly between the processing and transfer chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the processing chamber is exposed to the atmosphere for manual replacement of the edge ring and heat transfer sheet, then the replacement can be performed, but the downtime increases and processing efficiency decreases
Solution Approach 1:
A transfer chamber is introduced as an intermediary space between the processing chamber and the external environment. The edge ring assembly is replaced within this sealed transfer chamber, allowing atmospheric exposure only in the transfer chamber while maintaining vacuum integrity in the processing chamber. This mediator enables replacement operations without compromising processing continuity.
Solution Approach 2:
The system is divided into functionally independent segments: the processing chamber for plasma operations, the transfer chamber for replacement operations, and the delivery structure for transportation. This segmentation allows the transfer chamber to be opened to atmosphere for easy replacement of the edge ring and heat transfer sheet, while the processing chamber maintains its vacuum seal continuously.
2Ease of operation
If the processing chamber is opened to atmosphere for replacement, then the edge ring and heat transfer sheet can be replaced, but the processing continuity is interrupted
Solution Approach 1:
The transfer chamber serves as a mediator that decouples the replacement operation from the processing chamber. Operators can easily replace the edge ring and heat transfer sheet in the atmospheric transfer chamber, while the processing chamber remains sealed and operational, maintaining processing continuity.
Solution Approach 2:
The replacement operation is moved to a different spatial dimension (the transfer chamber) that is connected to but separate from the processing chamber. This dimensional separation allows replacement activities to occur in parallel with processing activities, eliminating interruptions to productivity.
3Ease of manufacture
If manual replacement is performed by exposing the chamber, then the components can be replaced, but system complexity increases due to chamber opening/closing procedures
Solution Approach 1:
The system is segmented into a processing chamber and a transfer chamber with independent access. The transfer chamber can be opened to atmosphere without affecting the processing chamber, simplifying the replacement procedure while maintaining overall system integrity. Each chamber operates independently, reducing the complexity of coordinated opening/closing procedures.
Data Source
AI summary
A plasma processing apparatus includes a processing chamber, a support in the processing chamber to support an edge ring assembly that includes a heat transfer sheet that is attached to an edge ring, and the edge ring surrounding the substrate supported by support, and a delivery structure for vertically moving and transferring the edge ring assembly between the plasma processing apparatus and the pressure-reducible transfer apparatus. The transfer apparatus includes a pressure-reducible transfer chamber connected to the processing chamber, and a transferer for transferring the edge ring assembly. Without exposing the processing chamber to the atmosphere, the transferer supports the heat transfer sheet and moves the edge ring assembly to a position above the support, the delivery structure receives the edge ring assembly from the transferer and supports the heat transfer sheet, and the support receives the edge ring assembly to support the edge ring via the heat transfer sheet.