Edge Ring Assembly Transfer for Vacuum Plasma Chamber Replacement
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Solution Overview
Problem
In plasma processing systems, replacing the edge ring and its associated heat transfer sheet requires exposing the processing chamber to the atmosphere, leading to prolonged downtime and inefficiencies due to the need for manual replacement and deterioration of the heat transfer sheet.
Innovation Solution
A plasma processing system with a pressure-reducible transfer apparatus allows for the replacement of the edge ring and heat transfer sheet without exposing the processing chamber to the atmosphere, using a delivery structure to vertically move the edge ring assembly between chambers, supported by a heat transfer sheet, and employing a transferer to transfer the assembly between processing and transfer chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the processing chamber is exposed to the atmosphere for manual replacement of the edge ring and heat transfer sheet, then the replacement can be performed, but the downtime increases and processing efficiency decreases
Solution Approach 1:
A transfer chamber is introduced as an intermediary space between the processing chamber and the external environment. The edge ring assembly is replaced within this sealed transfer chamber, allowing atmospheric exposure only in the transfer chamber while maintaining vacuum in the processing chamber. This mediator enables replacement operations without compromising the processing chamber's vacuum state or requiring system shutdown.
Solution Approach 2:
The system is divided into functionally independent segments: the processing chamber for plasma operations, the transfer chamber for replacement operations, and the delivery structure for transportation. This segmentation allows the replacement operations to occur in isolation in the transfer chamber, preventing downtime for the entire system and enabling continuous processing.
2Productivity
If the heat transfer sheet is repeatedly used, then cost is reduced, but the sheet deteriorates and replacement is required
Solution Approach 1:
The heat transfer sheet is designed as a disposable component that is pre-attached to the edge ring assembly. When the sheet deteriorates after use, the entire edge ring assembly with the degraded sheet is replaced as a single unit through the automated transfer system. This approach is more efficient than attempting to replace just the sheet, as the assembly replacement can be performed automatically without disassembly, reducing downtime despite the sheet being short-lived.
Solution Approach 2:
The heat transfer sheet is pre-attached to the edge ring assembly before the assembly enters the processing chamber. This preliminary attachment ensures proper positioning and eliminates the need for complex alignment operations during replacement. The pre-assembled units are stored ready-for-use, and when replacement is needed, a fresh pre-assembled assembly is simply transferred into position.
3Adaptability or versatility
If manual replacement procedures are used, then flexibility is maintained, but operation complexity and contamination risk increase
Solution Approach 1:
The system performs the replacement operation autonomously through automated transfer mechanisms. The delivery structure automatically transports the edge ring assembly from the transfer chamber to the processing chamber, and the transfer chamber automatically maintains vacuum isolation. This self-service automation eliminates manual intervention, reducing operational complexity and contamination risk while maintaining flexibility through programmable control.
Solution Approach 2:
The transfer chamber maintains a vacuum or controlled atmosphere environment during the replacement operation, creating an inert barrier between the atmospheric external environment and the vacuum processing chamber. This inert environment prevention eliminates contamination risks associated with manual operations and allows the system to maintain vacuum integrity throughout the replacement process.
Data Source
AI summary
A plasma processing apparatus includes a processing chamber, a support in the processing chamber to support an edge ring assembly that includes a heat transfer sheet that is attached to an edge ring, and the edge ring surrounding the substrate supported by support, and a delivery structure for vertically moving and transferring the edge ring assembly between the plasma processing apparatus and the pressure-reducible transfer apparatus. The transfer apparatus includes a pressure-reducible transfer chamber connected to the processing chamber, and a transferer for transferring the edge ring assembly. Without exposing the processing chamber to the atmosphere, the transferer supports the heat transfer sheet and moves the edge ring assembly to a position above the support, the delivery structure receives the edge ring assembly from the transferer and supports the heat transfer sheet, and the support receives the edge ring assembly to support the edge ring via the heat transfer sheet.