In-Line Vision Tracking for Edge Ring Verification in EFEM Handling
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Solution Overview
Problem
In semiconductor wafer processing, there is a lack of efficient methods to automatically verify and track consumable parts like edge rings, leading to potential errors in loading the correct type and location of edge rings in process modules, which can result in wafer scrap events and impact the quality and profitability of semiconductor manufacturing.
Innovation Solution
A machine vision system is employed within the substrate processing system, utilizing a robot with an aligner and a camera to capture and verify the identity of consumable parts through a code on their surface, ensuring correct delivery to the appropriate process module by comparing the captured image against a consumable parts database.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual loading and registration of edge rings is performed, then flexibility in loading different types of edge rings is maintained, but human error occurs leading to incorrect edge rings being loaded into process modules
Solution Approach 1:
The patent replaces manual mechanical loading and visual verification with an automated machine vision system. The image capture system takes photographs of edge rings, and image processing algorithms automatically identify and verify the correct loading of edge rings into process modules, eliminating human error while maintaining operational flexibility.
Solution Approach 2:
The patent creates digital copies (images) of the edge rings and their loading positions. By capturing images of the process modules and analyzing them through image processing, the system verifies the correctness of edge ring loading without requiring physical inspection, thus improving reliability without proportionally increasing device complexity.
2Productivity
If automated approach is used for replacing consumable parts, then replacement speed and consistency are improved, but system complexity and cost increase
Solution Approach 1:
The patent employs a multi-functional robot system that can perform both the physical replacement of consumable parts (edge rings) and the verification of their correct loading. The same robotic system that handles the mechanical replacement also integrates image capture and processing capabilities, eliminating the need for separate verification equipment and reducing overall system complexity.
Solution Approach 2:
The patent merges the consumable part replacement function with the verification function into a single integrated automated system. The robot performs replacement while the image capture system simultaneously verifies the operation, combining multiple functions into one coordinated process that improves productivity without proportionally increasing complexity.
3Adaptability or versatility
If multiple types of edge rings are stored in buffer stations, then versatility of the system is improved, but difficulty in distinguishing and verifying correct edge rings increases
Solution Approach 1:
The patent utilizes visual characteristics (color, pattern, or other distinguishable features) of edge rings as identification markers. The image capture system detects these visual features, and image processing algorithms analyze them to identify the specific type of edge ring and verify its correct placement, enabling differentiation among multiple edge ring types without increasing physical complexity.
Solution Approach 2:
The patent introduces image processing algorithms as an intermediary between the physical edge rings and the verification system. These algorithms analyze visual features of edge rings and translate them into identifiable characteristics, serving as a mediator that enables the system to distinguish and verify multiple edge ring types efficiently without requiring complex physical sensors or markers on the edge rings themselves.
Data Source
AI summary
Systems for tracking consumable parts in a substrate processing system includes a mounting enclosure with a consumable parts station used for storing consumable parts within. The mounting enclosure has an opening toward an EFEM to enable a robot of the EFEM to retrieve a consumable part from the consumable parts station. An image capture system is configured to capture an image of a code on the consumable part. The image capture system includes a camera and a light source. The image capture system is positioned near the opening of the mounting enclosure, such that the camera and the light source are pointed toward the opening. A processor is communicatively connected to the image capture system and to a controller. The controller causes the robot to move the consumable part from the consumable parts station via the opening and to position the code on the consumable part within a field of view of the image capture system. The controller issues a command to the processor to activate the light source and the camera to capture an image of the code, process the image, generate an identifier of the consumable part and forward the identifier to the controller. The controller is configured to use the identifier to verify that the consumable part is suitable for a subsequent operation.