Editable Functional Flow Control for Semiconductor Etching Machines
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Solution Overview
Problem
Existing semiconductor etching machines require software updates to function properly after changes or updates, leading to delays and wastage of time and manpower as the machine cannot operate normally until the update is complete.
Innovation Solution
A host computer and control system that allows for editable functional flows, including a control unit, service configuration unit, and functional flow unit, enabling users to edit and store action instructions and logic instructions, which can be executed by a lower level computer, thereby improving flexibility and automation in modifying machine functions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If control software is updated to ensure normal machine application, then machine reliability is improved, but machine productivity deteriorates because the whole machine cannot operate normally until the software update is complete
Solution Approach 1:
The patent segments the software update process into multiple independent modules or components that can be updated separately. Instead of requiring a complete system shutdown for full software replacement, the system divides the control software into functional modules that can be individually loaded, tested, and activated. This allows the machine to maintain operational capability in non-updated modules while updating specific modules, thus improving reliability without completely halting productivity.
Solution Approach 2:
The patent implements preliminary action by preparing and validating software updates in advance before they are applied to the running system. The system allows software modules to be pre-loaded, pre-tested, and validated in a staging environment while the machine continues to operate with existing software. Once validated, the updated modules are seamlessly integrated without requiring complete system shutdown, thus maintaining both reliability improvement and productivity.
2Adaptability or versatility
If control software is updated correspondingly when machine is updated or process is changed, then machine adaptability is improved, but loss of time increases due to the update process delays
Solution Approach 1:
The patent implements dynamics by creating a flexible, adaptive software architecture that can dynamically load and switch between different software versions and configurations. The system allows runtime loading of updated software modules without complete shutdown, and provides dynamic configuration capabilities that enable the machine to adapt to process changes on-the-fly. This dynamic approach allows adaptability improvement while minimizing downtime through selective and incremental software updates.
Solution Approach 2:
The patent utilizes parameter changes by allowing software configuration parameters to be modified and updated independently of the core control software. The system enables parameter-level updates that can be applied quickly without requiring full software reinstallation. This allows the machine to adapt to process changes by simply changing parameters while maintaining the core operational software, thus improving adaptability with minimal time loss.
3Manufacturing precision
If manual software update process is used, then manufacturing precision is maintained through careful control, but ease of operation deteriorates due to manual intervention requirements
Solution Approach 1:
The patent implements self-service by enabling the system to automatically perform software update validation, testing, and deployment without requiring manual intervention at each step. The system includes automated mechanisms for verifying software integrity, checking compatibility, and managing the update process. This self-service capability maintains manufacturing precision through automated quality checks while dramatically improving ease of operation by eliminating repetitive manual update tasks.
Solution Approach 2:
The patent utilizes feedback mechanisms to automatically monitor and verify software update processes. The system provides real-time feedback on update status, system health, and operational parameters, allowing automated adjustment of the update process to maintain precision. This feedback-driven approach ensures that updates are applied correctly while reducing manual oversight requirements, thus improving ease of operation while maintaining manufacturing precision through automated verification.
Data Source
AI summary
The present disclosure provides a host computer, and a control system and method of a machine. The host computer includes a control unit, a service configuration unit, and a functional flow unit. The control unit is configured to control a lower level computer to execute items of a functional flow of the machine. The service configuration unit is configured with action instruction information used to execute the functional flow of the machine and configured to interact with the control unit. The functional flow unit stores items of the functional flow of the machine edited by a user and is configured to interact with the control unit. A technical solution of the host computer and the control system and method of the machine may realize an editable function of the functional flow of the machine to improve flexibility, convenience, and a degree of automation of addition/modification of the functional flow.