EDS Data Blocks for Real-Time Composition Analysis

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Solution Overview

Problem

Current methods for analyzing chemical elements using energy dispersive X-ray spectrometry (EDS) face challenges in achieving real-time composition variation measurement, are cumbersome, and require repetitive measurements due to low time resolution and sample irradiation, making it difficult to obtain accurate data, especially when sample composition changes rapidly or is contaminated.

Innovation Solution

A method and data structure that allows for the creation and recording of energy and elapsed time data blocks, enabling the reproduction of spectra at arbitrary intervals from a single measurement, using a surface analysis instrument that detects secondary rays and analyzes their energies, with tags indicating data about energies and times, allowing for efficient data management and spectrum reproduction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If measurements are performed at intervals of 10 seconds, then the measurement process is manageable, but the time resolution is too low to capture real-time composition variations

Engineering Contradiction:
Improvetime resolutionVSAvoidmeasurement speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent performs all necessary spectral measurements continuously during a single irradiation process, collecting all required data in advance before any sample degradation occurs. This preliminary data collection enables post-processing at any desired time resolution without requiring additional measurements.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent creates multiple virtual spectra at different time intervals by processing the continuous measurement data in different ways. Instead of performing multiple physical measurements, it generates multiple data representations from a single continuous measurement, allowing users to analyze composition variations at any desired time resolution.

Inventive Principle:
Principle #26Copying

2Measurement precision

If repetitive measurements are performed to achieve higher time resolution, then the time resolution improves, but the sample composition changes due to prolonged irradiation

Engineering Contradiction:
Improvetime resolutionVSAvoiddata accuracy
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The system performs continuous spectral acquisition throughout the entire irradiation period, capturing all composition information before the sample degrades. This single continuous measurement replaces multiple separate measurements, eliminating the problem of sample changes between measurements.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements continuous spectral measurement throughout the irradiation process without interruption, ensuring that composition data is captured continuously rather than at discrete intervals. This continuous data stream allows reconstruction of composition variations at any desired time resolution without additional irradiation.

Inventive Principle:
Principle #20Continuity of useful action

3Ease of operation

If measurements are performed at a single location, then the measurement process is simple, but the data cannot be reproduced if sample damage or contamination occurs

Engineering Contradiction:
Improvemeasurement simplicityVSAvoiddata reproducibility
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent collects all necessary spectral data during a single continuous measurement before sample degradation occurs. By accumulating complete measurement data in advance, the system ensures that all required information is captured in one go, eliminating the need for repositioning or repeated measurements.

Inventive Principle:
Principle #10Preliminary action

4Adaptability or versatility

If multiple separate measurements are performed to achieve different time resolutions, then the desired time resolution can be obtained, but the process becomes cumbersome and laborious

Engineering Contradiction:
Improvetime resolution flexibilityVSAvoidmeasurement process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent creates a universal measurement system where a single continuous spectral acquisition can be processed to generate data at multiple different time resolutions. The measurement system serves multiple purposes simultaneously, allowing users to analyze composition variations at any desired time interval from the same raw data without performing separate measurements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system generates multiple virtual data sets representing different time resolutions by processing the continuous measurement data in different ways. These are essentially copies or transformations of the same underlying measurement, allowing flexible analysis without additional measurement complexity.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the acquisition of spectra at desired time intervals with a single measurement, allowing for real-time composition analysis and handling of sample contamination, reducing the need for repetitive measurements and improving time resolution, thus providing accurate and efficient data acquisition.

Implementation Method 1

when the sample is being irradiated with an electron beam, the composition of the sample may vary with the elapse of time

Methodology Applied
Scientific EffectX-ray emission: X-Ray

Implementation Method 2

the desired region is scanned in two dimensions with an electron beam by moving the beam relative to the sample

Methodology Applied
Scientific EffectElectron beam irradiation: Electron Beam

Implementation Method 3

the produced X-rays are spectrally analyzed by the EDS, and the number of photons present in each energy range is counted

Methodology Applied
Scientific EffectEnergy dispersive X-ray spectroscopy: X-Ray

Implementation Method 4

where the sample is irradiated with an electron beam for 100 seconds, if it is to be examined how the concentration of a certain element contained in the sample varies

Methodology Applied
Scientific EffectIon beam irradiation: Ion Beam

Data Source

PatentUS7498573B2Method for obtaining and processing surface analysis data
Publication Date: 2009.03.03 JEOL LTD
  • US7498573B2 patent drawing
  • US7498573B2 patent drawing
  • US7498573B2 patent drawing

AI summary

A method of managing data obtained by measurements. The method permits EDS (energy dispersive spectroscopy) spectra to be collected in one operation. Energies detected by an EDS detector are converted by a pulse height analyzer into pulses of heights corresponding to the energies. The heights of the pulses in a distribution are assigned to multiple channels. The number of pulses in each channel is counted. A data processing circuit sends data blocks to a CPU. In each data block, a tag indicative of being X-ray energy data and the value of energy are combined. The CPU sequentially stores incoming data blocks into a hard disk.