Elemental Analysis System Using EDS and TES for Accuracy Throughput

Solution Overview

Problem

Existing element analysis systems face challenges in achieving sufficient analysis accuracy and throughput when using devices with different energy resolutions, such as EDS and TES, as they either lack sufficient energy resolution or have low measurement throughput.

Innovation Solution

An analysis system that performs elemental analysis by comparing a first energy spectrum of a target sample acquired using a first element analysis device (like EDS) with a second energy spectrum of a reference sample acquired using the same first device, and then using a second element analysis device with higher energy resolution (like TES) for further analysis based on the comparison results.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If EDS is used for element analysis, then measurement throughput is high, but energy resolution is insufficient and elements cannot be sufficiently identified

Engineering Contradiction:

Improvemeasurement throughputVSAvoidenergy resolution

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The analysis process is divided into two stages: first using EDS for rapid screening and element distribution mapping, then using TES only for specific regions or elements that require higher energy resolution. This segmentation allows the system to achieve both high throughput for general analysis and high precision when needed.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system dynamically switches between EDS and TES based on the analysis requirements. The switching decision is made adaptively during the measurement process, allowing the system to optimize between throughput and precision in real-time based on what is being analyzed.

Inventive Principle:

Principle #15Dynamics

2Measurement precision

If TES is used for element analysis, then energy resolution is high, but measurement throughput is low

Engineering Contradiction:

Improveenergy resolutionVSAvoidmeasurement throughput

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The analysis process is divided into two stages: first using EDS for rapid screening and element distribution mapping, then using TES only for specific regions or elements that require higher energy resolution. This segmentation allows the system to achieve both high throughput for general analysis and high precision when needed.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Instead of using TES for all measurements, the system applies TES only partially - specifically for elements or regions where its superior energy resolution provides necessary discrimination capability. This partial application of the high-resolution device avoids excessive use while ensuring adequate analysis where needed.

Inventive Principle:

Principle #16Partial or excessive action

3Measurement precision

If TES is excessively used, then analysis accuracy is sufficient, but measurement throughput decreases excessively

Engineering Contradiction:

Improveanalysis accuracyVSAvoidmeasurement throughput

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

Instead of using TES for all measurements, the system applies TES only partially - specifically for elements or regions where its superior energy resolution provides necessary discrimination capability. This partial application of the high-resolution device avoids excessive use while ensuring adequate analysis where needed.

Inventive Principle:

Principle #16Partial or excessive action

Solution Approach 2:

The system uses EDS results as feedback to determine where TES analysis is needed. The EDS provides initial element identification and distribution information, and based on this feedback, the system selectively applies TES to regions or elements requiring higher resolution, thus avoiding excessive use while maintaining accuracy.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables sufficient analysis accuracy and throughput by selectively using devices with higher energy resolution only when necessary, thereby balancing energy resolution and measurement throughput.

Implementation Method 1

an energy dispersive X-ray spectroscopy (EDS) device is used

Methodology Applied

Scientific EffectX-ray emission: X-Ray

Implementation Method 2

an X-ray analyzer using a superconducting transition edge sensor (TES) having higher energy resolution than EDS

Methodology Applied

Scientific EffectX-ray detection using transition edge sensor: Superconductivity

Data Source

PatentUS20250189468A1Analysis System, Analysis Method, and Analysis Program

Publication Date: 2025.06.12 HITACHI HIGH TECH CORP

AI summary

An object of the present disclosure is to obtain sufficient analysis accuracy and throughput when a sample is analyzed using two or more element analysis devices having different energy resolutions. An analysis system according to the present disclosure performs elemental analysis by using a second element analysis device having higher energy resolution than a first element analysis device, based on a result obtained by comparing a first energy spectrum of a target sample acquired by using the first element analysis device with a second energy spectrum of a reference sample acquired by using the first element analysis device (see FIG. 2).