EFEM Air Intake Port Geometry for Uniform Clean Gas Diffusion
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Solution Overview
Problem
The existing air intake ports in equipment front end modules (EFEMs) for semiconductor processing often fail to effectively diffuse clean gas due to their geometry, leading to inadequate distribution and potential contamination of substrates.
Innovation Solution
The design includes an air intake port with a larger air inlet surface area compared to the air outlet, and optionally features a fin to enhance airflow distribution, ensuring efficient diffusion of clean gas throughout the EFEM.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional air intake port geometry is used, then the structure is simple, but the clean gas does not diffuse effectively into the EFEM
Solution Approach 1:
The air intake port is divided into multiple components: an air inlet, an air outlet, and internal fins. This segmentation allows each component to perform a specific function - the inlet introduces air, the outlet distributes it, and the fins enhance diffusion - thereby improving clean gas diffusion effectiveness while maintaining reasonable structural complexity
Solution Approach 2:
The air outlet is designed with a smaller cross-sectional area compared to the air inlet, creating a dimensional transition that promotes gas diffusion. This dimensional change from a larger inlet to a constrained outlet forces the air flow to expand and diffuse more effectively into the EFEM environment
2Reliability
If the air inlet size is made larger than the air outlet, then clean gas diffusion is improved, but the device complexity increases
Solution Approach 1:
The air intake port structure acts as an intermediary between the external air source and the EFEM interior. By designing the port with a larger inlet and smaller outlet, it mediates the air flow to ensure proper diffusion and distribution, preventing substrate contamination while managing the complexity through a well-defined intermediate structure
Solution Approach 2:
Different portions of the air intake port are designed with different properties - the inlet has a larger area for air introduction, the outlet has a smaller area for controlled distribution, and fins are strategically placed to enhance diffusion in specific regions. This local differentiation optimizes contamination prevention while keeping the overall design manageable
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures uniform and efficient diffusion of clean gas, preventing substrate contamination by ensuring all areas of the EFEM receive the clean air, thereby maintaining a clean environment for substrate processing.
Implementation Method 1
a situation may arise where the clean gas does not diffuse into the EFEM. Therefore, there is a need for a system that can effectively and efficiently diffuse a clean gas into an EFEM
Implementation Method 2
a fan filter unit (FFU) connected to the top wall and configured to provide filtered air to the housing
Data Source
AI summary
A substrate processing apparatus may comprise: an equipment front end module comprising a housing bounded by front and back walls, first and second side walls between the front back walls, a top wall, and a bottom wall; a load port connected to the front wall and configured to receive a front opening unified pod (FOUP); a load lock chamber connected to the back wall and configured to load or unload a substrate; a front-end robot disposed in the housing and configured to transfer the substrate between the FOUP and the load lock chamber; a fan filter unit (FFU) connected to the top wall and configured to provide filtered air to the housing; and an air intake port provided above the FFU, and comprising an air inlet for introducing air and an air outlet for providing the air to the FFU. The air inlet is larger than the air outlet.