EFEM Flow Modification Fixture for Uniform FOUP Purging

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Solution Overview

Problem

The challenge in semiconductor manufacturing is achieving uniform and effective purging of silicon wafers within front opening unified pods (FOUPs) due to turbulent gas flow at the interface between the equipment front end module (EFEM) and the FOUP, leading to non-uniform humidity and oxygen levels, which is exacerbated by varying EFEM configurations.

Innovation Solution

A flow modification fixture is introduced, comprising a sheet of material with apertures or a metallic mesh, positioned within the EFEM to deflect or laminarize gas flow, ensuring consistent purging performance across different EFEM configurations by modifying the gas flow at the FOUP-EFEM interface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If gas flow is increased to improve purging effectiveness, then moisture and oxygen removal is enhanced, but turbulent gas flow at the FOUP-EFEM interface causes non-uniform humidity and oxygen levels

Engineering Contradiction:

Improvepurging effectivenessVSAvoiduniformity of humidity and oxygen levels

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

A flow modification fixture is introduced as an intermediary component at the FOUP-EFEM interface. This fixture includes a flow modification feature that deflects gas flow away from the FOUP opening, serving as a mediator between the gas flow system and the FOUP to eliminate turbulent interaction while maintaining effective purging

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The flow modification fixture segments the gas flow path by creating a defined flow modification region. The fixture divides the interface area into regions with controlled flow characteristics, allowing uniform gas distribution across the FOUP opening while preventing direct turbulent entry

Inventive Principle:

Principle #1Segmentation

2Manufacturing precision

If EFEM configurations are standardized to improve purge performance consistency, then uniform purging is achieved, but adaptability to different existing EFEM configurations is reduced

Engineering Contradiction:

Improveconsistency of purging performanceVSAvoidcompatibility with various EFEM configurations

Core Design Contradiction:

Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The flow modification fixture is designed with universal adaptability to interface with different FOUP and EFEM configurations. The fixture can be configured to work with various EFEM types while maintaining consistent flow modification functionality, serving multiple compatibility requirements with a single design approach

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The flow modification fixture incorporates adjustable or configurable features that allow adaptation to different EFEM configurations. The fixture can be dynamically adjusted or reconfigured to match various interface geometries, maintaining consistent flow modification performance across different system configurations

Inventive Principle:

Principle #15Dynamics

3Speed

If gas flow rate is increased to improve purging speed, then moisture and oxygen levels are reduced faster, but gas deflection into the FOUP interior disrupts purge performance

Engineering Contradiction:

Improvepurging speedVSAvoidpurge performance stability

Core Design Contradiction:

SpeedVSReliability

Solution Approach 1:

The flow modification feature performs preliminary anti-action by deflecting gas flow away from the FOUP opening before the gas can enter the FOUP interior. This preemptive deflection prevents the harmful effect of gas intrusion while allowing high flow rates to maintain effective purging speed

Inventive Principle:

Principle #9Preliminary anti-action

Solution Approach 2:

The flow modification fixture converts the potentially harmful high-velocity gas flow into a beneficial controlled flow pattern. By deflecting the gas flow in a controlled manner, the high velocity is redirected to enhance purging effectiveness without causing disruptive turbulence or direct intrusion into the FOUP

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The flow modification fixture enhances purge performance and maintains desired relative humidity and oxygen levels within the FOUP, improving product yield by reducing gas entry into the FOUP and ensuring consistent results across various EFEM setups.

Implementation Method 1

A flow modification fixture is introduced, comprising a sheet of material with apertures or a metallic mesh, positioned within the EFEM to deflect or laminarize gas flow

Methodology Applied

Scientific EffectLaminar flow: Laminar Flow

Data Source

PatentUS12183611B2Flow modification fixture for an equipment front end module

Publication Date: 2024.12.31 ENTEGRIS INC

AI summary

An equipment front end module. An equipment front end module (EFEM) includes a flow modification feature projecting away from an interior wall of the equipment front end module and extending into an interior of the equipment front end module (EFEM) at an angle. The flow modification feature modifies the flow of gas flowing from a top to a bottom of the EFEM by deflecting gas flow away and/or laminarizing gas flow across an opening of the EFEM, which may improve the purge performance of a wafer carrier docked at the EFEM.