EFEM Load Port Teaching Using Sensors for Clean Wafer Transfer
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Solution Overview
Problem
Current semiconductor manufacturing processes face inefficiencies due to misalignment issues during wafer transfer, leading to increased teaching time, contamination risks, and reduced productivity, particularly in single-wafer cleaning processes where manual intervention is required, and the transfer robot's hand may interfere with wafer carriers' side walls during slanted access.
Innovation Solution
An automatic teaching apparatus for semiconductor manufacturing equipment that uses front end sensors and central sensors on the end effector, combined with detection pins and semicircular blocks along the edges of the equipment front end module, to set and maintain the end effector's position without a separate manual teaching jig, allowing for automatic teaching and maintaining a clean environment by eliminating operator entry into the equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual teaching operation is performed with operator entering EFEM, then teaching can be conducted, but contamination occurs and productivity decreases
Solution Approach 1:
The system uses self-service teaching where the transfer robot autonomously performs teaching operations without operator intervention. The robot automatically moves the end effector to teach positions and detects coordinates using sensors, eliminating the need for operators to enter the EFEM and thereby preventing contamination while maintaining teaching functionality
Solution Approach 2:
The patent replaces manual mechanical teaching operations with an automated sensor-based system. Instead of operators manually positioning components, the system uses detection pins, semicircular blocks, and sensors to automatically detect positions and teach the transfer robot, substituting mechanical manual operations with automated detection and control systems
2Ease of operation
If manual teaching is performed, then teaching can be completed, but substantial time is consumed reducing productivity
Solution Approach 1:
The transfer robot performs self-teaching autonomously by automatically moving to predetermined teach positions and detecting coordinates through sensors. This eliminates the time-consuming manual teaching process where operators must manually position and adjust components, significantly reducing teaching time and improving overall process productivity
Solution Approach 2:
The system implements preliminary positioning features such as detection pins and semicircular blocks that are pre-installed at specific locations. These features enable the robot to quickly and accurately locate teach positions without manual intervention, performing the positioning action in advance to streamline the teaching process and reduce time consumption
3Adaptability or versatility
If transfer robot accesses wafer carriers slantingly, then end access is achieved, but interference with side wall occurs
Solution Approach 1:
The patent introduces semicircular blocks as intermediary features that mediate between the transfer robot's slanted access path and the wafer carrier's side wall. These blocks are positioned to guide the robot's end effector, allowing slanted access to the wafer carrier opening while preventing direct contact and interference with the side wall, thus maintaining both access capability and operational safety
4Productivity
If wafer position is misaligned in buffer, then transfer efficiency is maintained, but wafer damage or cleaning operation failure occurs
Solution Approach 1:
The system implements feedback through wafer position detection sensors that monitor the alignment of wafers in the buffer. When misalignment is detected, the system can provide feedback signals to adjust the transfer robot's positioning or alert operators, preventing wafer damage and ensuring proper placement in the cleaning section while maintaining transfer efficiency through automated monitoring and correction
Data Source
AI summary
An automatic teaching apparatus for semiconductor manufacturing equipment includes: an equipment front end module (EFEM); one or more load ports provided along an edge of one side of the EFEM to be connected to an inside of the EFEM; a transfer robot disposed in the inside of the EFEM and configured to transfer a wafer to the one or more load ports by an end effector to process the wafer, and a load port teaching unit configured to detect a fixed position of the end effector in a state of unloading the wafer such that the wafer is placed in the fixed position within the load port.