EFEM Load Port Venting for Fast Nitrogen Purge and Particle Removal
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Solution Overview
Problem
Existing EFEMs face challenges in quickly replacing the atmosphere in the accommodation chamber with an inert gas and in preventing particles from flying up during the operation of the opening/closing mechanism, which can contaminate the transfer chamber.
Innovation Solution
The EFEM is configured with a gas discharge unit connected to the accommodation chamber of the load port, allowing for rapid replacement of the atmosphere with inert gas and simultaneous discharge of particles, utilizing a fan in the accommodation chamber to suppress particle flight.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the gas discharge unit is connected to the lower portion of the gas return path (conventional configuration), then the circulation flow path can maintain nitrogen atmosphere, but the accommodation chamber cannot be quickly replaced with nitrogen atmosphere and particles may fly up during opening/closing mechanism operation
Solution Approach 1:
The gas discharge function is segmented from the main circulation flow path and specifically directed to the accommodation chamber. The discharge unit connects to the accommodation chamber separately, allowing independent atmosphere control and rapid nitrogen replacement in this specific area without affecting the overall circulation system.
Solution Approach 2:
The accommodation chamber acts as an intermediary space between the external environment and the transfer chamber. By connecting the discharge unit to the accommodation chamber, particles and contaminants are removed in this intermediate zone before they can enter the transfer chamber, protecting the main processing area.
2Reliability
If the gas discharge unit is connected to the lower portion of the gas return path (conventional configuration), then the circulation flow path can maintain nitrogen atmosphere, but particles in the accommodation chamber may fly up due to opening/closing mechanism operation
Solution Approach 1:
The harmful particles and contaminants are extracted from the accommodation chamber through the discharge unit connected to this specific chamber. This separate extraction system removes particles at their source before they can be disturbed by opening/closing mechanism operations or enter the transfer chamber.
Solution Approach 2:
The opening/closing mechanism operations that previously caused particles to fly up are now beneficial - they help stir and mobilize particles toward the discharge unit's intake, facilitating more effective particle removal through the dedicated discharge path.
3Reliability
If the accommodation chamber is not included in the circulation flow path (conventional configuration), then the gas return path can maintain nitrogen atmosphere, but the atmosphere replacement process takes longer time
Solution Approach 1:
The discharge unit is positioned to directly access the accommodation chamber, enabling preliminary removal of contaminants and rapid establishment of nitrogen atmosphere in this chamber before substrate processing begins. This preliminary action in the accommodation chamber prepares the system for immediate operation.
Solution Approach 2:
The system transitions from a static circulation-only configuration to a dynamic system with both circulation and active discharge functions. The discharge unit can be activated independently to rapidly change atmosphere conditions in the accommodation chamber, providing dynamic control over atmosphere replacement timing and rate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables quick atmosphere replacement, reduces particle contamination, and minimizes the time required to start operations, while also reducing inert gas consumption and costs.
Implementation Method 1
utilizing a fan in the accommodation chamber to suppress particle flight
Implementation Method 2
the gas discharge unit is connected to the accommodation chamber to discharge the gas in the transfer chamber via the accommodation chamber
Implementation Method 3
an inert gas supply unit configured to supply an inert gas to the transfer chamber
Data Source
AI summary
Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port 4, a housing configured to define, in the housing, a transfer chamber closed by connecting the load port 4 to an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipe 49 for discharging a gas in the transfer chamber. The load port 4 includes an opening/closing mechanism 54 capable of opening and closing a lid 101 of a mounted FOUP 100, and an accommodation chamber 60 kept in communication with the transfer chamber via a slit 51b and configured to accommodate a part of the opening/closing mechanism 54. The discharge pipe 49 is connected to the accommodation chamber 60 to discharge the gas in the transfer chamber via the accommodation chamber 60.