EFEM Connection Module Sealing for Misalignment-Tolerant Installation
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Solution Overview
Problem
Existing connection modules for EFEM and front chambers face installation challenges when sufficient operation space is not available outside the EFEM, leading to difficulties in aligning and securing the modules due to positional deviations.
Innovation Solution
The EFEM design includes a connection module with a flexible sealing part and frame parts that allow for easy installation by pressing from inside the housing, enabling compensation for positional deviations and maintaining airtightness through a bellows structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the connection module is installed from outside the EFEM, then the installation can be performed with sufficient operation space, but the installation becomes impossible when operation space is insufficient
Solution Approach 1:
The connection module installation direction is inverted from the conventional outside-to-inside approach to inside-to-outside. The first frame part is pressed from the transfer chamber side (inside the housing) against the rear member, and the second frame part is pressed from the front chamber side, enabling installation without external operation space.
2Reliability
If rigid sealing structures are used, then the sealing strength is high, but the ability to compensate for positional deviations is reduced
Solution Approach 1:
The sealing part includes a flexible portion made of elastic material that can expand and contract in the predetermined direction. This flexible structure maintains airtight sealing between the transfer chamber and front chamber while compensating for positional deviations between the EFEM and processing apparatus.
Solution Approach 2:
The sealing part utilizes elastic deformation to change its physical state, allowing it to adapt to positional variations. The flexible portion's ability to expand and contract enables the sealing structure to accommodate dimensional changes and misalignments while maintaining sealing effectiveness.
3Ease of manufacture
If the connection module structure is simplified for easy installation, then the installation ease is improved, but the sealing reliability may be compromised
Solution Approach 1:
The connection module is segmented into distinct components: first frame part, second frame part, and sealing part with flexible portion and enclosure portion. This segmentation allows each component to be optimized for its specific function while maintaining overall structural integrity and sealing reliability.
Solution Approach 2:
The sealing part is designed with dynamic characteristics through the flexible portion that can expand and contract. This dynamic design allows the sealing structure to adapt to operational conditions and maintain reliability without requiring complex rigid support structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates easy and secure installation of the connection module even in constrained spaces, ensuring airtight sealing and allowing for visual inspection and maintenance without external access, thus enhancing operational efficiency.
Implementation Method 1
the flexible portion capable of expanding and contracting at least in a predetermined direction
Implementation Method 2
the first frame part arranged around the housing-side opening and pressed by a transfer chamber-side surface of the rear member
Implementation Method 3
configured to seal the second frame part and the front chamber by being pressed by a front chamber-side opening portion
Data Source
AI summary
An EFEM includes a housing including a transfer chamber in which a processing target object is transferred, and a connection module provided between the transfer chamber and a front chamber, wherein the housing includes a rear member having a housing-side opening through which the processing target object is capable of passing, the connection module includes a first frame part arranged around the housing-side opening and pressed by a transfer chamber-side surface of the rear member, a second frame part provided in the front chamber and arranged around a front chamber-side opening, and connected to the first frame part, and a sealing part configured to seal the second frame part and the front chamber, and the sealing part includes a flexible portion capable of expanding and contracting at least in a predetermined direction, and an enclosure portion connected to the flexible portion and configured to enclose the front chamber-side opening.