EFEM Robot Auto-Teaching for Positional Recalibration

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Solution Overview

Problem

Re-programming EFEM robots after positional changes due to maintenance or crashes is time-consuming and prone to human error, leading to potential substrate damage.

Innovation Solution

An automatic teaching element determines positional parameters to generate new movement commands for EFEM robots, adjusting paths to account for changes without manual intervention.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual re-programming is used after EFEM robot positional changes, then the robot can be re-calibrated to new positions, but the process is time-consuming and prone to human error

Engineering Contradiction:

Improveprogramming accuracyVSAvoidre-programming time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent replaces manual mechanical teaching operations with an automated optical measurement system. A laser tracker or vision system automatically measures the robot's end effector position and calculates new movement commands, eliminating the need for manual operator intervention and significantly reducing re-programming time while improving accuracy

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system enables the EFEM robot to automatically re-calibrate itself after positional changes. The automated teaching element measures the robot's new position and generates corrected movement commands without requiring external manual intervention, allowing the system to self-correct and resume operations quickly

Inventive Principle:

Principle #25Self-service

2Reliability

If manual teaching is used to re-program EFEM robots, then positional adjustments can be made, but human error may lead to substrate damage

Engineering Contradiction:

Improvesubstrate safetyVSAvoidprogramming complexity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent replaces error-prone manual teaching operations with automated optical measurement and calculation systems. The laser tracker or vision system precisely measures positions and the controller automatically calculates corrected movement commands, eliminating human error that could lead to substrate damage

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system implements automated feedback by continuously measuring the robot's actual position using optical sensors and comparing it with the planned trajectory. The controller automatically adjusts movement commands based on this feedback, ensuring precise positioning and preventing substrate damage from incorrect movements

Inventive Principle:

Principle #23Feedback

Data Source

PatentUS20250299985A1EFEM robot auto teaching methodology

Publication Date: 2025.09.25 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

The present disclosure relates to an apparatus. The apparatus includes a position measurement unit having one or more sensors configured to take measurements describing a change in location of an equipment front end module (EFEM) within a chamber between different times. A processing element is configured to utilize the measurements to determine a set of commands configured to operate the EFEM in a manner that accounts for the change in location of the EFEM between the different times.