EFEM Side Storage Pod Purge Recirculation for Corrosive Gas Control
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Solution Overview
Problem
Electronic device manufacturing processes expose substrates to chemicals that can lead to outgassing of corrosive gases like fluorine, bromine, and chlorine, which can degrade the substrates if not properly removed, posing a challenge in maintaining optimal environmental conditions during processing.
Innovation Solution
The implementation of equipment front end modules (EFEMs) with side storage pods (SSPs) that utilize a recirculation path for purge gases, including a chemical filter to minimize harmful gases, and environmental control systems to maintain dry and low O2 conditions within the EFEM chamber, ensuring substrates are protected during processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are exposed to processing components (compounds and gases) during manufacturing, then processing can be performed, but corrosive gases are generated that degrade substrates
Solution Approach 1:
The patent extracts and removes corrosive gases from the processing environment using a purge gas system. A separate purge gas flow is introduced through purging conduits to extract harmful gases from the substrate surface and transfer chamber, preventing substrate degradation while allowing continuous processing
Solution Approach 2:
The patent introduces a purge gas as an intermediary substance that mediates between the processing components and substrates. This purge gas acts as a protective medium that removes corrosive gases without interfering with the primary processing operations, thus protecting substrates during manufacturing
2Object-affected harmful factors
If purge gas flow rate is increased to remove corrosive gases, then substrate protection improves, but gas recirculation efficiency decreases
Solution Approach 1:
The patent implements continuous recirculation of purge gas through the transfer chamber. The purge gas system continuously circulates gas to maintain protective conditions, and the recirculation path ensures continuous removal of corrosive gases without interruption to the processing workflow
Solution Approach 2:
The patent recovers and recirculates purge gas that has passed through the transfer chamber. Instead of discarding the purge gas after a single use, it is recirculated back through the chamber via recirculation conduits, maximizing the utility of the purge gas and reducing waste while maintaining effective substrate protection
3Manufacturing precision
If environmental control is enhanced to maintain dry and low O2 conditions, then substrate quality improves, but system complexity increases
Solution Approach 1:
The purge gas system serves multiple functions simultaneously: it protects substrates from corrosive gases, maintains dry conditions, controls oxygen levels, and enables continuous processing. This multi-functional approach achieves precise environmental control without requiring separate dedicated systems for each function, thus managing complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively controls environmental exposure, reducing substrate degradation by removing corrosive gases and maintaining optimal conditions, thereby enhancing processing efficiency and substrate quality.
Implementation Method 1
a recirculation path for purge gases... Gas is also exhausted from the side storage container into the EFEM chamber. Meanwhile, at least a portion of the purge gas from the EFEM chamber is recirculated back into the upper plenum
Implementation Method 2
including a chemical filter to minimize harmful gases
Data Source
AI summary
Electronic device processing assemblies including an EFEM with at least one side storage pod attached thereto. The side storage pod has a side storage pod container. A supply conduit extends between an upper plenum of the EFEM to the side storage pod container. A fan causes purge gas to simultaneously flow into the EFEM chamber and into the side storage pod container. The fan also causes recirculation of the purge gas from the EFEM chamber. Methods of operating EFEMs and EFEMs are also disclosed.