Effective Areas for Continuous IC Layout Parameter Representation

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Solution Overview

Problem

Integrated circuit fabrication faces challenges in representing local data consistently across layouts due to parameters like dielectric thickness being poorly defined or discontinuous, affecting global effects such as thickness of dielectric layers.

Innovation Solution

The method involves determining effective areas within the integrated circuit layout with uniform parameter values, assigning nominal values to unassigned locations, and using area-based averaging to generate a continuous global representation by considering overlapping areas, ensuring smooth transitions and well-defined global effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If parameters are used to represent local data in integrated circuit layouts, then the representation captures local variations, but the parameters are not well defined or continuous across the layout

Engineering Contradiction:

Improveparameter definitionVSAvoidcontinuity

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent introduces effective areas as intermediary constructs between discrete geometric features and global parameters. Each geometric feature (point, line, region) generates an effective area that serves as a mediator to distribute its parameter values continuously across the layout. This intermediary approach resolves the contradiction by providing both local representation (through feature-specific effective areas) and global continuity (through overlapping area integration).

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent transitions from zero-dimensional points, one-dimensional lines, and two-dimensional regions to three-dimensional effective areas by sweeping geometric features through space. This dimensional elevation allows parameter values to be distributed volumetrically across the layout, creating continuous parameter fields that are well-defined everywhere while maintaining local feature characteristics.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Device complexity

If discrete regions with uniform parameters are defined, then local data representation is simplified, but discontinuities arise at region boundaries

Engineering Contradiction:

Improveparameter uniformityVSAvoidboundary continuity

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The patent merges overlapping effective areas from multiple geometric features by integrating their parameter contributions. When effective areas overlap, the parameter values are combined through integration, ensuring continuity at boundaries. This merging process eliminates discontinuities while preserving the simplified uniform parameter characteristics within each effective area.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent transforms discrete uniform parameters into continuous parameter fields by allowing parameters to vary smoothly across effective area boundaries. Through integration of overlapping effective areas, parameters transition from step-function discontinuities to continuous variations, resolving the boundary continuity problem while maintaining local uniformity where appropriate.

Inventive Principle:

Principle #35Parameter changes

3Measurement precision

If local parameters are used for accurate representation, then local accuracy is improved, but global consistency and smooth transitions are lost

Engineering Contradiction:

Improvelocal accuracyVSAvoidglobal smoothness

Core Design Contradiction:

Measurement precisionVSStability of the object's composition

Solution Approach 1:

The patent segments the layout into multiple effective areas, each associated with specific geometric features and maintaining local accuracy. By dividing the global parameter field into locally-accurate effective area segments, the patent preserves local precision while enabling smooth global transitions through the overlapping and integration of these segments.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by allowing different effective areas to have different parameter characteristics based on their associated geometric features. Each effective area maintains local accuracy specific to its feature while contributing to the global smooth parameter field through overlapping integration, thus achieving both local precision and global consistency.

Inventive Principle:

Principle #3Local quality

Data Source

PatentUS11361139B2Continuous global representation of local data using effective areas in integrated circuit layouts

Publication Date: 2022.06.14 SYNOPSYS INC

AI summary

A method for representing a layout of an integrated circuit (IC) includes, in part, determining multiple regions of the IC layout based on one or more parameters, determining multiple areas associated with the multiple regions where each area has a characteristic of a region of the multiple regions, assigning a first set of values to locations of the IC layout outside the multiple areas, assigning a second set of values to locations of the IC layout within the multiple areas, and, in response to a determination that a location of the IC layout is in two or more overlapping areas of the multiple areas, determining a value to assign to the location in accordance with the values of the two or more overlapping areas. The method further includes generating data representative of the IC layout design in accordance with the first and second set of values, and the assigned value.