Effluent Gas Abatement CO Feedback for By-Product Control

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Solution Overview

Problem

Existing abatement apparatus face challenges in effectively treating effluent gas streams from manufacturing processes without producing undesirable by-products, often requiring advanced knowledge of the effluent composition and being complex in operation.

Innovation Solution

The method involves monitoring carbon monoxide concentration in the exhaust of the abatement apparatus using an infrared spectrometer and adjusting the fuel/oxidant ratio based on this measurement to optimize operating conditions, reducing undesirable by-products without needing prior knowledge of the effluent composition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the fuel/oxidant ratio is adjusted to improve effluent gas treatment efficiency, then the removal of hazardous gases is enhanced, but undesirable by-products such as carbon monoxide and nitrogen oxides may be produced

Engineering Contradiction:
Improveeffluent gas treatment efficiencyVSAvoidcarbon monoxide and nitrogen dioxide production
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The system continuously monitors carbon monoxide concentration in the exhaust stream and uses this feedback to dynamically adjust the fuel/oxidant ratio. The controller modifies operating parameters based on real-time CO measurements to maintain optimal combustion conditions, thereby improving treatment efficiency while minimizing harmful by-product formation.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically changes the fuel/oxidant ratio parameter based on monitored CO concentrations. By adjusting this critical parameter in response to real-time measurements, the system optimizes combustion conditions to enhance effluent treatment while reducing the formation of carbon monoxide and nitrogen oxides.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If advanced knowledge of effluent composition is used to optimize treatment, then treatment effectiveness is improved, but system complexity and operational difficulty increase

Engineering Contradiction:
Improvetreatment effectivenessVSAvoidsystem operational complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system performs self-diagnosis and self-optimization by monitoring its own exhaust composition and automatically adjusting its operating parameters. The abatement apparatus determines its optimal operating conditions through real-time feedback from CO sensors, eliminating the need for external expert knowledge or complex pre-programming of effluent composition data.

Inventive Principle:
Principle #25Self-service

3Object-generated harmful factors

If the fuel/oxidant ratio is optimized to reduce carbon monoxide, then by-product formation is minimized, but treatment efficiency may be compromised

Engineering Contradiction:
Improvecarbon monoxide productionVSAvoideffluent treatment efficiency
Core Design Contradiction:
Object-generated harmful factorsVSProductivity

Solution Approach 1:

The system uses continuous CO concentration monitoring to provide feedback for dynamic adjustment of the fuel/oxidant ratio. This closed-loop control enables the system to maintain optimal combustion conditions that simultaneously minimize CO production and preserve effluent treatment efficiency, avoiding the trade-off present in open-loop systems.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the efficiency of effluent gas treatment by minimizing carbon monoxide production and reducing by-products like nitric oxide and nitrogen dioxide, while optimizing resource use.

Implementation Method 1

monitoring the carbon dioxide present when treating the effluent stream using an infrared sensor

Methodology Applied
Scientific EffectInfrared absorption: Absorption (EM radiation)

Implementation Method 2

radiant burners use combustion to remove the undesirable compounds from the effluent gas stream

Methodology Applied
Scientific EffectCombustion: Combustion

Implementation Method 3

Fuel gas and air are simultaneously supplied to the foraminous burner to affect flameless combustion at the exit surface

Methodology Applied
Scientific EffectFlameless combustion: Combustion

Data Source

PatentUS12392486B2Optimising operating conditions in an abatement apparatus
Publication Date: 2025.08.19 EDWARDS LTD
  • US12392486B2 patent drawing
  • US12392486B2 patent drawing
  • US12392486B2 patent drawing

AI summary

A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.