Effusion Cell Temperature Control for Organic Deposition
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Solution Overview
Problem
The effusion cell in deposition systems experiences nozzle clogging and splashing due to condensation of evaporated deposition material, leading to non-uniformity of the organic layer formed on substrates and changes in material characteristics, especially when abrupt temperature increases occur.
Innovation Solution
A method involving temperature and deposition rate control, where the guiding pathway and injection nozzle are heated before the crucible, and the crucible is heated using a first heating structure, with subsequent cooling to prevent condensation and ensure stable deposition rates, allowing the effusion cell to be shifted to a film forming area only when the deposition rate is stable.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the crucible is heated from the beginning using deposition rate control method, then the deposition rate can be controlled, but the temperature of the effusion cell is abruptly increased causing material characteristic changes or splashing
Solution Approach 1:
The patent applies preliminary action by first heating the guiding pathway and injection nozzle before heating the crucible. This preparatory heating prevents condensation of evaporated material in the pathway and nozzle, eliminating clogging and splashing issues that would occur if heating started simultaneously or in reverse sequence.
Solution Approach 2:
The heating process is segmented into distinct stages: first heating the guiding pathway and injection nozzle, then heating the crucible. This segmentation allows each component to be heated at the appropriate time, preventing temperature shocks and material characteristic changes while maintaining deposition rate control.
2Productivity
If the effusion cell is heated to evaporate deposition material, then deposition can be performed, but condensation in the guiding pathway or injection nozzle causes clogging and non-uniform injection
Solution Approach 1:
The guiding pathway and injection nozzle are heated in advance before the crucible is heated for deposition. This preliminary action ensures that the pathway and nozzle remain above the condensation temperature of the deposition material, preventing clogging and ensuring uniform injection throughout the deposition process.
Solution Approach 2:
The patent changes the temperature parameters of different components at different times. The guiding pathway and injection nozzle are maintained at a higher temperature than the crucible initially, preventing condensation. This parameter change strategy ensures uniform material injection and consistent organic layer formation.
3Speed
If the crucible is heated abruptly, then evaporation and deposition can proceed quickly, but temperature overshoot causes splashing and material characteristic changes
Solution Approach 1:
The guiding pathway and injection nozzle are heated in advance before the crucible heating begins. This preliminary action establishes stable thermal conditions in the material transport path, allowing the crucible to be heated to high temperatures for rapid evaporation without causing splashing or material characteristic changes.
Solution Approach 2:
By pre-heating the guiding pathway and injection nozzle, the system creates a thermal cushion that prevents sudden temperature shocks and overshoot effects. This cushioning effect allows rapid crucible heating while maintaining stable material flow and preventing splashing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances the uniformity of the organic layer deposition, prevents nozzle clogging and splashing, and maintains material characteristics by controlling the effusion cell's temperature and deposition rate, ensuring a stable and uniform deposition process.
Implementation Method 1
the deposition material, which is heated by the heater and then evaporated
Implementation Method 2
the condensation of a guiding pathway or an injection nozzle
Data Source
AI summary
In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.