Electronic Fuse Thermal Profile Uniformity via Segmented Lines

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Solution Overview

Problem

In integrated circuits, electronic fuses (e-fuses) face challenges in achieving a uniform thermal profile during programming, leading to potential faults and reduced reliability due to variations in heat dissipation across the fuse structure.

Innovation Solution

The design of e-fuses with discontinuous current distributing lines or non-uniform width profiles, and the incorporation of a heat sink between the anode and cathode, ensures a more uniform thermal profile by balancing heat generation and dissipation across the fuse body, preventing incomplete programming and enhancing reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional continuous current distributing line is used in the e-fuse, then the structure is simple and easy to manufacture, but the thermal profile is non-uniform leading to programming faults and reduced reliability

Engineering Contradiction:
Improveprogramming reliabilityVSAvoidfuse structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The current distributing line is divided into multiple discontinuous segments rather than being continuous. This segmentation allows different portions of the line to have different thermal characteristics, enabling a more uniform overall thermal profile across the fuse body during programming, thereby improving programming reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The current distributing line is designed with varying width along its length, creating non-uniform local properties. Specific regions have different widths to compensate for thermal gradients, ensuring that heat is distributed more evenly across the fuse body despite the line's non-uniform geometry.

Inventive Principle:
Principle #3Local quality

2Reliability

If the current distributing line has a non-uniform width profile or is discontinuous, then the thermal profile becomes more uniform improving reliability, but the manufacturing complexity increases

Engineering Contradiction:
Improveprogramming reliabilityVSAvoidmanufacturing ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The current distributing line is divided into multiple discontinuous segments rather than being continuous. This segmentation allows different portions of the line to have different thermal characteristics, enabling a more uniform overall thermal profile across the fuse body during programming, thereby improving programming reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The width of the current distributing line is varied along its length rather than maintaining a constant width. This parameter change allows specific regions to have different thermal masses and heat dissipation characteristics, compensating for thermal gradients and achieving a more uniform thermal profile during programming.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If heat dissipation is not optimized in the e-fuse structure, then the design is simpler, but incomplete programming occurs and faults are introduced

Engineering Contradiction:
Improveprogramming completenessVSAvoidthermal management structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The current distributing line is divided into multiple discontinuous segments rather than being continuous. This segmentation allows different portions of the line to have different thermal characteristics, enabling a more uniform overall thermal profile across the fuse body during programming, thereby improving programming reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The current distributing line is designed with varying width along its length, creating non-uniform local properties. Specific regions have different widths to compensate for thermal gradients, ensuring that heat is distributed more evenly across the fuse body despite the line's non-uniform geometry.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves a substantially uniform thermal profile during e-fuse programming, increasing reliability and preventing faults by optimizing heat dissipation, thereby improving the performance and longevity of integrated circuit components.

Implementation Method 1

the incorporation of a heat sink between the anode and cathode, ensures a more uniform thermal profile by balancing heat generation and dissipation across the fuse body

Methodology Applied
Scientific EffectHeat sink: Heat Sink

Implementation Method 2

Programming of an e-fuse is typically accomplished by forcing a large electrical current through the e-fuse. This high current is intended to break or rupture a portion of the e-fuse structure

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS9293414B2Electronic fuse having a substantially uniform thermal profile
Publication Date: 2016.03.22 GLOBALFOUNDRIES US INC
  • US9293414B2 patent drawing
  • US9293414B2 patent drawing
  • US9293414B2 patent drawing

AI summary

An electronic fuse includes a body, an anode coupled to the body, and a cathode coupled to the body. Each of the anode and the cathode includes a first line contacting the body. The first line is discontinuous along its length and includes a first portion and a second portion with a space therebetween. A second line is disposed above the first line and a plurality of vias couple the first and second lines. The first portion of the first line is coupled to a first subset of the plurality of vias and the second portion of the first line is coupled to a second subset of the vias.