Ejection Apparatus Negative Pressure Leakage Prevention

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Solution Overview

Problem

Existing ejection apparatuses do not effectively handle leakage of ejection material from ejection openings, leading to potential contamination of substrates and apparatuses.

Innovation Solution

An ejection apparatus with a pressure control unit that maintains negative pressure inside a storage container, allowing for the formation of a meniscus in ejection openings and automatically dropping pressure to prevent leakage, featuring a flexible partition and a breakage detection mechanism to collect leaked material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If pressure inside the storage container is maintained at a predetermined positive pressure, then ejection material can be supplied to the ejection head, but the ejection material may leak from the ejection openings causing contamination

Engineering Contradiction:
Improveejection material supplyVSAvoidcontamination
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The patent changes the pressure parameter from positive to negative pressure inside the storage container. This parameter change prevents ejection material leakage while maintaining supply to the ejection head, resolving the contradiction between material supply and contamination prevention

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies negative pressure as a preliminary counteracting force to prevent the harmful effect of leakage before it occurs. The negative pressure creates a pressure differential that opposes any tendency of the ejection material to leak from the ejection openings

Inventive Principle:
Principle #9Preliminary anti-action

2Object-affected harmful factors

If pressure inside the storage container is maintained at negative pressure, then ejection material leakage is prevented, but ejection material may not be supplied adequately to the ejection head

Engineering Contradiction:
Improveleakage preventionVSAvoidejection material supply
Core Design Contradiction:
Object-affected harmful factorsVSQuantity of substance

Solution Approach 1:

The patent introduces a pump that dynamically adjusts pressure inside the storage container based on detection signals. When ejection material supply is insufficient, the pump increases pressure to the first pressure level, ensuring adequate supply while maintaining negative pressure conditions for leakage prevention

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements a feedback control system where a detection unit monitors ejection material supply conditions and signals the control unit to adjust pressure accordingly. This feedback mechanism ensures adequate material supply while preventing leakage through appropriate pressure management

Inventive Principle:
Principle #23Feedback

3Object-affected harmful factors

If a breakage detection mechanism is added to detect leakage, then contamination can be detected, but device complexity increases

Engineering Contradiction:
Improveleakage detectionVSAvoidapparatus structure
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent designs the detection unit to serve multiple functions: detecting ejection material supply conditions, monitoring for leakage, and triggering pressure adjustments. This multi-functionality reduces the need for separate dedicated components, thereby limiting the increase in device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively suppresses contamination by preventing ejection material leakage and allowing for efficient collection of leaked material, ensuring clean operation and reducing substrate and apparatus contamination.

Implementation Method 1

a pressure control unit that maintains pressure inside the storage container at a negative pressure

Methodology Applied
Scientific EffectNegative pressure: Pressure Drop

Implementation Method 2

the first pressure being capable of forming a meniscus of the ejection material in the ejection opening

Methodology Applied
Scientific EffectMeniscus formation: Surface Tension

Data Source

PatentUS11267252B2Ejection apparatus and imprint apparatus
Publication Date: 2022.03.08 CANON KK
  • US11267252B2 patent drawing
  • US11267252B2 patent drawing
  • US11267252B2 patent drawing

AI summary

Provided is an ejection apparatus including: an ejection head having an ejection opening for ejecting an ejection material in a liquid state; a storage container storing therein the ejection material and communicating with the ejection head; and a pressure control unit that maintains the pressure inside the storage container at a negative pressure. The pressure control unit generates a first pressure in the storage container in a normal operation, the first pressure being capable of forming a meniscus of the ejection material in the ejection opening. The pressure control unit drops the pressure inside the storage container to at least the first pressure in a case where the pressure inside the storage container reaches a predetermined pressure above the first pressure.