Ejection Device with Degassing Unit for Imprint Apparatus

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Ejection failures in imprint devices used for semiconductor fabrication often occur due to air bubbles in the pressure chamber, leading to uneven imprint material thickness and mold breakage, particularly when the circulation system is connected and disconnected, causing foreign object contamination.

Innovation Solution

An ejection device with a containing unit separated by a flexible member, incorporating a degassing unit and a circulation mechanism that reduces gas dissolved in the imprint material, preventing air bubble formation and maintaining a stable pressure environment to ensure consistent ejection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a circulation system is connected to reduce dissolved gas in the ejection head, then the amount of dissolved gas in the imprint material is reduced, but foreign objects are generated due to rubbing between the coupling and pipe during connection/disconnection

Engineering Contradiction:

Improveejection reliabilityVSAvoidforeign object contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the harmful function (connection/disconnection of circulation system) from the ejection head by placing the circulation system in a separate containing unit. This allows the circulation system to be removed entirely when not needed, preventing foreign object generation while maintaining the ability to degas the imprint material when required.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent segments the ejection device into two independent units: an ejection head for pattern transfer and a containing unit with circulation system for material preparation. This segmentation allows each unit to perform its specific function without interfering with the other, preventing foreign object contamination while maintaining circulation capabilities.

Inventive Principle:

Principle #1Segmentation

2Reliability

If air bubbles are present in the pressure chamber, then the ejection process is disrupted causing ejection failure, but increasing circulation to remove bubbles may cause foreign object contamination

Engineering Contradiction:

Improveejection reliabilityVSAvoidforeign object contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a flexible partition as an intermediary between the ejection head and the containing unit with circulation system. This partition allows selective communication: it enables the circulation system to remove air bubbles when needed while preventing foreign objects from the circulation system from contaminating the ejection head.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent extracts the circulation system from the ejection head structure, placing it in a separate containing unit. This separation allows the circulation system to perform bubble removal without being a source of foreign object contamination in the ejection process.

Inventive Principle:

Principle #2Taking out (Extraction)

3Object-affected harmful factors

If the ejection head structure is simplified without a circulation system, then foreign object contamination is reduced, but air bubbles cannot be effectively removed leading to ejection failures

Engineering Contradiction:

Improveforeign object contaminationVSAvoidejection reliability

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent creates a multi-functional containing unit that can serve both as a storage reservoir and as a circulation/degassing system. This unit can be connected to the ejection head when bubble removal is needed and disconnected when not needed, providing universal functionality without compromising ejection head simplicity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent makes the connection between the containing unit and ejection head dynamic rather than fixed. The flexible partition and removable coupling allow the system to transition between connected and disconnected states, enabling bubble removal only when necessary while preventing foreign object contamination during ejection operations.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses ejection failures and mold breakage by reducing air bubbles and foreign object contamination, ensuring consistent pattern formation and maintaining the integrity of the imprint material during repeated use and device attachment/detachment processes.

Implementation Method 1

pump unit, provided in the connecting unit, for moving the imprint material between the first opening and the second opening

Methodology Applied

Scientific EffectPressure differential: Pressure Gradient

Implementation Method 2

degassing unit, provided in the connecting unit, for collecting gas dissolved in the imprint material

Methodology Applied

Scientific EffectGas dissolution and phase separation: Phase Change

Implementation Method 3

a second space separated from the first space by a flexible member

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS11143956B2Ejection device and imprint apparatus

Publication Date: 2021.10.12 CANON KK

AI summary

Provided is an ejection device and an imprint apparatus which can suppress ejection failures and breakage of a mold. To achieve this, a circulation mechanism including a degassing unit is provided in an ejection head.