Fluid Ejection Head Pedestal Void Space Isolates Semiconductor Chip

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Solution Overview

Problem

Fluid ejection heads face challenges due to thermal stress and deformation caused by mismatched coefficients of thermal expansion between silicon chips and thermoplastic bodies, leading to chip distortion and cracking during the manufacturing process and usage.

Innovation Solution

A fluid ejection head design featuring a pedestal with a flexible circuit bonding surface comprising a plurality of ribs and a damage reducing structure, such as a void space or compressible silicone rubber, to isolate the pedestal from the surrounding flexible circuit bonding surface, reducing shock and thermal stress transmission to the chip.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a thermoplastic body with high CTE is used to attach the silicon chip, then the bonding strength and ease of manufacture are improved, but thermal stress and chip distortion increase due to CTE mismatch

Engineering Contradiction:
Improvebonding strengthVSAvoidchip distortion
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The patent segments the bonding interface by introducing a pedestal structure with a bonding surface that separates the chip from the main thermoplastic body. This segmentation allows the chip to be bonded to a localized area with controlled thermal properties, reducing the overall thermal stress while maintaining bonding strength.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The pedestal acts as an intermediary structure between the silicon chip and the thermoplastic body. It provides a bonding surface that mediates the thermal expansion mismatch, allowing the chip to be securely attached while reducing the transmission of thermal stress from the high-CTE thermoplastic material.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the ejection head size and number of ejection actuators are increased to improve output, then productivity is improved, but manufacturing precision requirements increase and tolerance control becomes more difficult

Engineering Contradiction:
Improveejection head outputVSAvoidtolerance control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The ejection head is segmented into modular components including the pedestal, nozzle plate, and chip assembly. This segmentation allows each component to be manufactured and tested independently, making it easier to control tolerances and maintain precision even as the overall system size and complexity increase.

Inventive Principle:
Principle #1Segmentation

3Stability of the object's composition

If ceramic substrates are attached to the chip to address thermal compression, then chip stability is improved, but device cost increases substantially

Engineering Contradiction:
Improvechip stabilityVSAvoiddevice cost
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

Instead of using expensive ceramic substrates, the patent employs a cost-effective thermoplastic pedestal structure that provides sufficient thermal stress management. This approach prioritizes adequate performance over maximum durability, using a less expensive material that achieves the necessary chip stability without the high cost of ceramics.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

4Stability of the object's composition

If silicon bridges are used in the via area to address thermal stress, then chip stability is improved, but fluid flow problems occur in the chip via area

Engineering Contradiction:
Improvechip stabilityVSAvoidfluid flow problems
Core Design Contradiction:
Stability of the object's compositionVSObject-generated harmful factors

Solution Approach 1:

The patent segments the structural support function from the fluid flow path by using a pedestal structure located at the periphery of the chip. This separation ensures that stress-management structures do not interfere with the fluid channels, maintaining unobstructed fluid flow while providing necessary chip stability.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively reduces chip damage by minimizing stress and deformation, enhancing the reliability and durability of the fluid ejection head components during manufacturing and usage.

Implementation Method 1

Heating the components causes each one to expand according to their respective CTEs. As the parts cool and shrink, the higher CTE plastic body shrinks more than the lower CTE silicon heater chip resulting in thermal stresses on the chip.

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

A fluid ejection head design featuring a pedestal with a flexible circuit bonding surface comprising a plurality of ribs and a damage reducing structure, such as a void space or compressible silicone rubber, to isolate the pedestal from the surrounding flexible circuit bonding surface, reducing shock and thermal stress transmission to the chip.

Methodology Applied
Scientific EffectCompression: Compression

Data Source

PatentEP3332967B1Fluid ejection head and method for reducing damage to semiconductor chip attached to nosepiece of fluid supply body for a fluid ejection head
Publication Date: 2021.01.13 FUNAI ELECTRIC CO LTD
  • EP3332967B1 patent drawingFigure 1
  • EP3332967B1 patent drawingFigure 2
  • EP3332967B1 patent drawingFigure 3

AI summary

A fluid ejection head (100) has a fluid supply body (102) having a nosepiece (104) with at least one fluid supply port. A pedestal (108) extends outwards from the exterior surface of the nosepiece (104) near the fluid supply port. A semiconductor chip mounting surface (110) is formed on the pedestal (108). A flexible circuit bonding surface (112), formed by a plurality of ribs (114), also extends outwards from the exterior surface of the nosepiece (104) adjacent the perimeter of the pedestal (108). A damage reducing structure (115) for reducing damage to a semiconductor chip mounted on the pedestal (108) is located between the pedestal (108) and the flexible circuit bonding surface (112). Similarly, a damage reducing structure (115) is located between each adjacent pair of the plurality of ribs (114). In each case, the damage reducing structure (115) may be void space that isolates and reduces damage caused by shock waves traveling through the fluid supply body (102) to the chip mounting surface and the chip mounted thereon.