Ejection Pipe Segmentation for Imprinting Purity

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Solution Overview

Problem

Existing methods for injecting liquid ejection materials into containers risk contamination due to foreign substances entering from external spaces or generated by friction between the injection pipe and the container, which compromises the cleanliness of the ejection material required for high-purity applications like semiconductor manufacturing.

Innovation Solution

A method and apparatus that connect a container to a tank using a pipe, inject the ejection material, block the pipe after injection, and cut it off to prevent contamination, ensuring the ejection material remains clean by isolating it from external substances and friction-generated impurities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the injection pipe is inserted into the container opening and pulled out after injection, then the ejection material can be injected into the container, but foreign substances from external space or friction between the pipe and plug can enter the liquid

Engineering Contradiction:
Improveejection material injectionVSAvoidforeign substance contamination
Core Design Contradiction:
Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The injection pipe is divided into two separate portions: a first portion that remains connected to the container and a second portion that remains connected to the tank. This segmentation allows the pipe to be cut into two parts after injection, with the blocked part retained in the first portion, preventing foreign substances from entering the container during the connection and disconnection processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The pipe is blocked at a specific position before the cutting step. This preliminary blocking action ensures that when the pipe is subsequently cut into two portions, the blocked part is retained in the first portion connected to the container, preventing any foreign substances from entering the ejection material during the separation process.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If the injection pipe is repeatedly connected and disconnected, then injection operations can be performed, but friction between the pipe and container opening generates foreign substances that contaminate the ejection material

Engineering Contradiction:
Improveinjection operation capabilityVSAvoidfriction-generated foreign substances
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

By segmenting the injection pipe into two permanent portions (first portion connected to container, second portion connected to tank) that are cut apart after injection, the system eliminates the need for repeated connection and disconnection operations. The friction-generated foreign substances problem is avoided because the pipe portions remain permanently separated after the initial injection.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The second portion of the injection pipe (connected to the tank) can be considered a disposable component that is used for a single injection operation and then permanently separated. This approach prevents the accumulation of friction-generated contaminants that would occur with repeated use of a single reusable pipe.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Data Source

PatentUS10894420B2Ejection-material injecting method, ejection-material ejection apparatus, and imprinting apparatus
Publication Date: 2021.01.19 CANON KK
  • US10894420B2 patent drawing
  • US10894420B2 patent drawing
  • US10894420B2 patent drawing

AI summary

An ejection material is injected into a container through a pipe. Thereafter, the pipe is blocked at a blocked part and then the pipe is cut off. The pipe is cut off such that the blocked part is included in a portion of the pipe connected to the container.